Biological and medical application of micro-electro-mechanical-systems (MEMS) is currently seen as an area of high potential impact. Integration of biology and microtechnology has resulted in the development of a number of platforms for improving biomedical and pharmaceutical technologies. This review provides a general overview of the applications and the opportunities presented by MEMS in med...

Abstract Flexoelectricity is a universal electro-mechanical coupling effect that occurs in dielectrics of all symmetric groups and becomes dominant at the micro- nano-scales. It plays an important role evaluating micro-electro-mechanical systems (MEMS) such as energy harvesters which convert vibrational to electric energy. At finer length scales, micro-inertia effects significantly contribute b...

Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media and/or high radiation will reduce weight, improve machine reliability and reduce cost in st...

With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen. Micro-Electro Mechanical Systems (MEMS) accelerometer is one of the available options. The performances of three of the MEMS accelerometers from different manufacturers are investigated in this...

-One of the latest manifestations of miniaturization in space applications is the development of standardized nanosatellite. Recent achievements and future trends of Micro-Electro-Mechanical Systems (MEMS) technology have indicated that microtechnology is the critical technologies of future space programs. Enabling technologies for demanding applications will surely make use of MEMS based compo...

Micro-electro-mechanical systems or MEMS are used in a variety of today’s technology and can be modeled using equations for nonlinear damped harmonic oscillators. Mathematical expressions have been formulated to determine resonance frequency shifts as a result of hardening and softening effects in MEMS devices. In this work we experimentally test the previous theoretical analysis of MEMS resona...

The high power dissipation density in today’s miniature electronic/mechanical systems makes on-chip thermal management crucial. In order to achieve quick-to-evaluate, yet accurate electro-thermal models, needed for the thermal management of microsystems, model order reduction is necessary. In this paper, we use Krylov-subspace methods for the order reduction of a electro-thermal MEMS model, ill...

We have proposed a unified approach to the modeling and study of developments in the field of MEMS and Nanotechnology and its application in futuristic Nano-enabled Cells. We have proposed a novel to approach reliability of MEMS enabled fuel cells. We know that reliability and accurate prediction of properties in nano domains remains a major challenge where still theories are being developed to...

We report a MEMS (Micro-Electro-Mechanical Systems)-based microbial fuel cell (MFC) that produces a high power density. The MFC features 4.5-μL anode/cathode chambers defined by 20-μm-thick photo-definable polydimethylsiloxane (PDMS) films. The MFC uses a Geobacter-enriched mixed bacterial culture, anode-respiring bacteria (ARB) that produces a conductive biofilm matrix. The MEMS MFC generated ...

As micro-device application in consumer and commercial products develops, efficient tools are required to simulate device dynamics and assess structural performance. An integrated methodology is developed for studying the dynamics of thin film bifurcating structures. Results are presented for a generic thin film structure, which exhibit classical electro-mechanical hysteresis. Such structures c...