Abstract This paper reviews the recent developments of micro-electromechanical system (MEMS) based electrostatically actuated tunable capacitors. MEMS capacitors (MBTCs) are important building blocks in advanced radio frequency communication systems and portable electronics. is due to their excellent performance compared solid state counterpart. Different designs, tuning mechanisms, parameters ...

We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensio...

Dip pen nanolithography (DPN) is a method of creating nanoscale chemical patterns on surfaces using an atomic force microscope (AFM) probe. Until now, efforts to increase the process throughput have focused on passive multi-probe arrays and active arrays based on thermal bimetallic actuation. This paper describes the first use of electrostatic actuation to create an active DPN probe array. Elec...

A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the cou...

The mathematical modeling and analysis of electrostatically actuated microand nanoelectromechanical systems (MEMS and NEMS) has typically relied upon simplified electrostatic-field approximations to facilitate the analysis. Usually, the small aspect ratio of typical MEMS and NEMS devices is used to simplify Laplace’s equation. Terms small in this aspect ratio are ignored. Unfortunately, such an...

The entire process of calibrating an electromechanical simulator – identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device – is presented. The simulation model for electrostatically-actuated beams is calibrated to a wide range of electrical and optical test st...

This research focused on improving the control and sensing of electrostatically actuated, large deflection bimorph beams for optical beam steering. Current iterations of designs utilize a ‘zipper’ beam and have demonstrated large deflection angles. However, with these devices precise control and deflection measurements can be difficult to achieve. Through using segmented bias channels of doped ...