The nonlinear pull-in behaviors of various electrostatic micro-actuators were simulated. The differential quadrature method (DQM) was applied to overcome the difficulty in solving the nonlinear equation of motion. Various types of micro-actuators, such as the cantilever beam actuator and the fixed-fixed beam actuator were derived and simulated to examine the feasibility of applying the DQM to t...

This work presents the study of dynamics and active control a cantilever sigmoid FGM beam with porosities in thermal environment. During this study, we considered Timoshenko beam’s theory combined finite element method (FEM). also comparative an experimental for vibration functionally graded piezoelectric (FGPM) to validate numerical model. Linear quadratic Gaussian (LQG) optimal Kalman filter ...

Abstract: In this study, a new analytical model is developed for an electrostatic Microelectromechanical System (MEMS) cantilever actuator to establish a relation between the displacement of its tip and the applied voltage. The proposed model defines the micro-cantilever as a rigid beam supported by a hinge at the fixed-end with a spring point force balancing the structure. The approach of the ...

Thermoelastic behavior of temperature-dependent (TD) and independent (TID) functionally graded variable thickness cantilever beam subjected to mechanical and thermal loadings is studied based on shear deformation theory using a semi-analytical method. Loading is composed of a transverse distributed force, a longitudinal distributed temperature field due to steady-state heat conduction from root...

In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called “U-shape cantilever beam,” we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the d...

Sensors & Transducers Journal (ISSN 1726-5479) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA). Available in electronic and CD-ROM. Abstract: Thermometry is an interested field in physics and metrology. In this paper, a capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed. The gov...

When assembling MEMS devices or manipulating biological cells it is often beneficial to have information about the force that is being applied to these objects. This force information is difficult to measure at these scales and up to now has been implemented using laser-based optical force measurement techniques or piezoresistive devices. In this paper we demonstrate a method to reliably measur...

The study of vibration response of a turbine blade helps to detect the crack presence in the blade which alters its dynamic characteristics. The change is characterized by changes in the modal parameters associated with natural frequencies. In this paper, study of vibration response is made for turbine blade in the presence of a crack like defect. Turbine blade is initially assumed as a cantile...

   Micro-electroactive polymers have wide applications from industry to healthcare. Artificial muscles, microvalves, microswitches, haptic sensing, blood pressure and pulse monitoring are some potential applications for micro-electroactive polymers. The most advantage of micro-electroactive polymers as sensors and actuators is bio-compatibility and low power threshold for large deformations...

A semi-analytical method is used to illustrate the behavior of a multimodal nonlinear electromechanical system which is under base-excitation. System is considered as piezo-ceramic patches attached to a cantilever beam coupled to a resistive load. The cantilever beam is modeled as a nonlinear Timoshenko beam using Assumed Mode method and equations of motion are derived through Lagrange's equati...