In March 1999, a HVEE Tandetron was installed in the Electrostatic Accelerator Building of National Institute of Radiological Sciences (NIRS) for particle induced X-ray emission (PIXE) analysis. The specifications of the Tandetron accelerator system operating at NIRS are as follows: the accelerating voltage is 0.4–1.7 MV, and the maximum beam current is 500 nA at 3.4 MeV. The accelerator facili...

A novel MEMS device architecture: the SOI SGMOSFET, which combines a solid-state MOS transistor and a suspended metal membrane in a unique metal-over-gate architecture, is proposed. A unified physical analytical model (weak, moderate and strong inversions) is developed and used to investigate main electrostatic characteristics in order to provide first-order design criteria for low-voltage oper...

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the m...

An optical fiber with nano-electromechanical functionality is presented. The fiber exhibits a suspended dual-core structure that allows for control of the optical properties via nanometer-range mechanical movements. We investigate electrostatic actuation achieved by applying a voltage to specially designed electrodes integrated in the cladding. Numerical and analytical calculations are preforme...

Capacitive accelerometers with electrostatic force feedback are widely employed, because of performance and robustness. The force feedback acts as a means for electronic modulation of the spring constant of the suspension. Commonly, the electrostatic feedback is employed for null-based acceleration measurement. A suitable electrostatic time-varying actuation could instead be used to make the ac...

Abstract This work proposes an examination into the static and dynamic behaviors of in-plane V-shaped microbeam under both electric forces axial loads. The microbeams are actuated with two separate electrodes uniform air gap across their length. effects initial rise DC bias voltage examined while varying loads ranging from compressive to tensile. numerical analysis is based on a nonlinear equat...

We describe a new geometry for electrostatic actuators to be used in sensitive laser interferometers, suited for prototype and table top experiments related to gravitational wave detection with mirrors of 100 g or less. The arrangement consists of two plates at the sides of the mirror (test mass), and therefore does not reduce its clear aperture as a conventional electrostatic drive (ESD) would...

Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to t...

This work presents the results of experimental and theoretical study static pull-in tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on combination inductive electrostatic actuation. A semi-analytical model to such phenomenon is developed, for first time, as result using qualitative technique Lagrangian approach analyze contactless suspensions recent progress in cal...

This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the v...