With the use of subwavelength photolithography, some layouts can have low printability and, accordingly, low yield due to the existence of bad patterns even though they pass design rule checks. A reasonable approach is to select some of the candidate bad patterns as forbidden. These are the ones with a high yield impact or low routability impact, and these are to be prohibited in the design pha...

Is it a defect? Will it print? Accelerating shrinks depends on successful pattern transfer. 8 Precision and Process Control Maintaining an acceptable precision-to-tolerance ratio drives adoption of a new metrology technique for sub-0.18 µm linewidth control. Investigating and quantifying overlay accuracy is only as good as the data you have. 35 Exposing The SCAAM Eliminate anomalies that afflic...

The Huizachal–Peregrina Anticlinorium in northeastern Mexico comprises a wide variety of Precambrian and Paleozoic basement units. In this work, Silurian-to-Permian unmetamorphosed siliciclastic successions (i.e., Cañón de Caballeros, Vicente Guerrero, Del Monte, Guacamaya formations) forming the Tamatán Group is described; group overlies Novillo metamorphic complex, which northernmost exposed ...

In this study, 115 samples taken from the stream sediments were analyzed for concentrations of As, Co, Cr, Cu, Ni, Pb, W, Zn, Au, Ba, Fe, Mn, Sr, Ti, U, V and Zr. In order to outline mineralization-derived stream sediments, various mapping techniques including fuzzy factor score, geochemical halos and fractal model were used. Based on these models, concentrations of Co, Cr, Ni, Zn, Ba, Fe, Mn, ...