İmalat teknolojisindeki gelişmeler neticesinde ortaya çıkan mikro ve nano elektromekanik sistemler (MEMS NEMS); biyosensörler, aktüatörler atomik kuvvet mikroskopları (AKM) gibi yapıya sahip sistemlerde çok yaygın olarak kullanılmaktadır. NEMS MEMS’ de kiriş veya benzeri elemanlar yapılar bulunmaktadır. Bu sabit kesitli olduğu değişken kesitlere olabilmektedirler. Söz konusu içindeki elemanları...

29 THE 4TH ANNUAL IEEE INTERnational Conference on Nano/Microengineered Molecular Systems (IEEE-NEMS) was held at the Sheraton Dameisha Resort in Shenzhen, China, 5–8 January 2009. More than 300 papers were presented by leading micro/nanotechnology researchers in academia and industry from around the globe. Topical areas of the conference included microelectro mechanical systems (MEMS), BioMEMS...

Magnetic field based micro/nanoelectromechanical systems (MEMS/NEMS) devices are proposed that use 10 nm diameter magnetic particles, with and without a carrier fluid, for a new class of nanoduct flows, nanomotors, nanogenerators, nanopumps, nanoactuators, and other similar nanoscale devices. A few examples of macroscopic ferrohydrodynamic instabilities that result in patterns, lines, and struc...

A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented. The approach relies entirely on commercial diamond material and standard cleanroom processes. As an example, batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.

Rapid progress in material science and nanotechnology has led to the development of shape memory alloys (SMA) polymers (SMP) based functional multilayered structures that, due their capability achieve properties not feasible by most natural materials, have attracted a significant attention from scientific community. These materials can sustain large deformations, which be recovered once appropr...

This paper addresses an overview of the wireless sensor networks. It is shown that MEMS/NEMS technologies and SIP concept are well suited for advanced architectures. It is also shown analog architectures have to be compatible with digital signal techniques to develop smart network of microsystem.

With quality factors (Q) often-exceeding 10,000, vibrating micromechanical resonators have emerged as leading candidates for on-chip versions of high-Q resonators used in wireless communications systems. However, as in the case for transistors, extending the frequency of MEMS resonators generally entails scaling of resonator dimensions. Unfortunately, smaller size often coincides with lower-pow...

Single layer chemical vapor deposited (CVD) graphene has shown great promise in enabling Micro and Nanoelectromechanical Systems (MEMS/NEMS) that can outperform current silicon-based state of the art. However, current methods in forming single layer graphene MEMS devices result in low yields due to capillary effects acting on the suspended material during the graphene transfer process. In addit...