A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...

Application of MEMS sensor in navigation is increasingly becoming important due to its advantages in terms of the quickly improving precision, robustness, high dynamic response and lower costs of development and usage. Moreover by employing the optimal estimation technique of Kalman filtering, the performance of MEMS based INS has been greatly enhanced by the integration of GNSS. This paper foc...

The ability to telemetrically measure strain is important in many aspects of daily life which brings important scientific and technological challenges in many sectors such as civil engineering, aircraft modeling, etc..,. Another unrealized, application area is human medicine and healthcare. MEMS (Micro ElectroMechanical System) technology for Radio Frequency applications has emerged in recent y...

We describe a wireless system for actuating and detecting the motion of MHz-frequency, low dissipation MEMS resonators. The overall system is essentially a custom-designed RFID-like system, with the tags based upon unique MEMS chips as opposed to conventional RFID chips. The MEMS devices are vacuum encapsulated, rugged, CMOS-compatible, and are approximately 1mm-by-1mm-by-0.5mm. The system is p...

MEMS thermal shear-stress sensors exploit heat-transfer effects to measure the shear stress exerted by an air flow on its solid boundary, and have promising applications in aerodynamic control. Classical theory for conventional, macroscale thermal shear-stress sensors states that the rate of heat removed by the flow from the sensor is proportional to the 1/3-power of the shear stress. However, ...

A novel MEMS electret energy harvester charged with UV light after sealed in a vacuum package is proposed. By 265 nm UV irradiation, electrons are generated inside the package through the photoelectric effect. Uniform surface potential on sidewalls of the comb drives has been obtained. With a MEMS electret generator in a 60 Pa package, 2.28 μW has been obtained at 1 g and 740 Hz, which is 10 ti...

Recent progress on high-performance polymer electrets based on CYTOP, novel charging methods using soft X-ray and vacuum UV, and development of MEMS energy harvesters are discussed. With the parylene high-aspect-ratio nonlinear springs and high-performance polymer electrets, we have successfully developed a MEMS electret generator for energy harvesting applications. With an acceleration of 1 G,...