The silicon micromechanical gyroscope, which will be introduced in this paper, represents a novel MEMS gyroscope concept. It is used for the damping of a single-channel control system of rotating aircraft. It differs from common MEMS gyroscopes in that does not have a drive structure, itself, and only has a sense structure. It is installed on a rotating aircraft, and utilizes the aircraft spin ...

MEMS gyroscopes offer a simple way to measure the angular rate of rotation in packages that easily attach to printed circuit boards, so they are a popular choice to serve as the feedback sensing element in many different types of motion control systems. In this type of function, noise in the angular rate signals (MEMS gyroscope output) can have a direct influence over critical system behaviors,...

In this paper, a simple but effective method for compensation of the quadrature error in MEMS vibratory gyroscope is provided. The proposed method does not require any change in the sensor structure, or additional circuit in the feedback path. The mathematical relations of the proposed feedback readout system were analyzed and the proposed solution assures good rejection capabilities. Based on ...

Microelectromechanical ~MEMS! gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscop...

The time-average method currently available is limited to analyzing the specific performance of the automatic gain control-proportional and integral (AGC-PI) based velocity-controlled closed-loop in a micro-electro-mechanical systems (MEMS) vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd order. In this paper, we propose ...

In a vertical type, vibratory gyroscope, the coupled motion between reference (driving) and sensing vibrations causes the zero-point output, which is the unwanted sensing vibration without angular velocity. This structural coupling leads to an inherent discrepancy between the natural frequencies of the reference and the sensing oscillations, causing curve veering in frequency loci. The coupled ...

In this paper a Cross Axis evaluation methodology is presented. The Cross Axis Sensitivity value depends on backend testing position tolerances as well as technological features and design properties of the MEMS gyroscope. A numerical model was developed to take into account the sources of cross axis related to the last two contributions, not considering backend tolerances. Given a specific str...

The article reviews most published inertial sensor technologies, including dynamically tuned, optical, MEMS vibratory, mechanical, solid-state, and fluid-based. working principles of the technologies are elaborated. Also, advantages disadvantages those sensors laid out. Owing to its excellent overall performance, such as simple structure, low cost, large measurement range, etc, current review f...

In this paper, an integrated MEMS gyroscope array method composed of two levels of optimal filtering was designed to improve the accuracy of gyroscopes. In the firstlevel filtering, several identical gyroscopes were combined through Kalman filtering into a single effective device, whose performance could surpass that of any individual sensor. The key of the performance improving lies in the opt...

This paper presents a functional architecture, system level design, and electronic evaluation of a unilateral vestibular prosthesis. The sensing unit of the prosthesis is a custom-designed one-axis micro-electromechanical system (MEMS) gyroscope. Similar to the natural semicircular canal, the MEMS gyroscope senses angular motion of the head and generates voltages proportional to the correspondi...