Articles you may be interested in In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications Appl. Comb-drive micro-electro-mechanical systems oscillators for low temperature experiments Rev.

A nano-displacement sensing method for micro-opto-electro-mechanical-systems (MOEMS) is proposed. The method is based on a square attice photonic crystal (PC) made of dielectric silicon posts, mounted on a micro mechanical flexure. The flexure is fixed at one end and is free to ove at the other, to enable elastic deformations that, by being transferred to the photonic crystal array, modify its ...

The suspended electrothermal polysilicon micro beams generate displacements and forces by thermal buckling effects. In the previous electro-thermal and thermo-elastic models of suspended polysilicon micro beams, the thermo-mechanical properties of polysilicon have been considered constant over a wide rang of temperature (20900°C). In reality, the thermo-mechanical properties of polysilicon depe...

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effec...

Growing need for a variety of micro electro-mechanical systems necessitates advances in manufacturing technologies for high volume production at low cost. In this study, a mechanical micro pump actuator will be modelled using MEMS module of COMSOL simulation tool. The micro pump actuator will be based on bimetallic actuation which in-turn is based on the difference in the thermal expansion coef...

Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involves phenomena occurring at several length-scales. In this paper we present a multi-scale finite element approach to properly allow for: (i) the propagation of stress waves inside the package; (ii) the dynamics of the whole MEMS; (iii) the spreading of micro-cracking in the failing part(s) of the se...

The polymer polyvinylidene difluoride (PVDF) has unique piezoelectric properties favorable for Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) applications. In the present research, we conducted nanometer-length scale characterization of this material using several high-resolution techniques. Specifically, we used an atomic force microscope (AFM) to study the ...

MEMS Oscillator design for high frequency application is approached in this project and its gain, noise and power are analyzed. The CMOS Micro Electro Mechanical System resonator structure is modeled using its RLC equivalent circuit where all passive components are extracted by COMSOL Mutiphysics tool. MEMS based oscillator requires to be combined with amplifier circuits to improve the performa...

Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor and actuator arrays, such as multifunctional skins applicable to robotic application and ambient...