This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software wa...

Insect flight studies have advanced our understanding of flight biomechanics and inspire micro-aerial vehicle (MAV) technologies. A challenge of centimeter or millimeter scale flight is that small forces are produced from relatively complex wing motions. We describe the design and fabrication of a millimeter-sized wing flapping mechanism to simultaneously control pitch and stroke of insect and ...

Micro- and nanofabrication techniques have revolutionized the pharmaceutical and medical fields as they offer the possibility for highly reproducible mass-fabrication of systems with complex geometries and functionalities, including novel drug delivery systems and bionsensors. The principal micro- and nanofabrication techniques are described, including photolithography, soft lithography, film d...

Whispering-Gallery mode based optical micro-devices have been demonstrated to have extremely high sensitivity to changes in local temperature owing to their high quality factors and frequency-based measurements. In this paper, we first examine different fabrication techniques for integrating whispering-gallery mode sensors directly onto heating components to realize on-chip in-situ dynamic temp...

We present a novel fabrication method for patterning PDMS thin films on solid surfaces. The method allows microstructures with precise lateral dimensions and heights to be formed using PDMS. We have applied this technology to form microfluidic channel units, reaction chambers, and micro elastic gaskets. This new fabrication method could potentially give rise to an efficient and reliable approac...

Microphotonic filters require precise control of the relative resonance frequencies of integrated dielectric micro-cavities. Using high-index-contrast microring resonators, we present, demonstrate, and analyze techniques allowing small and accurate corrections of resonance frequencies at fabrication. ©2006 Optical Society of America OCIS codes: (230.3120) Integrated optics devices; (230.4000) M...

We demonstrate a fabrication procedure for the direct integration of micro-ball lenses on planar integrated optical channel waveguide chips with the aim to reduce the divergence of light that arises from the waveguide in both horizontal and vertical directions. Fabrication of the lenses is based on photoresist reflow which is a procedure that allows for the use of photolithography for careful a...

conventional transdermal drug delivery systems (tdds) have been designed for drug delivery through the skin. these systems use the permeability property of stratum corneum, the outermost surface layer of the skin. applying polymeric micro and nanofibers in drug delivery has recently attracted great attention and the electrospinning technique is the preferred method for polymeric micro-nanofiber...