An ultrasonic vibration has been superposed on the normal electrode movement to increase the flushing effect during a micro electro-discharge machining (EDM) process. A systematic study on the effects of ultrasonic vibration on the EDM performance for fabricating microholes in Nitinol has been completed. The introduction of ultrasonic vibration to the microEDM process has more than 60 times inc...

While ceramics are important materials for electronic and microsystem packaging, they are difficult to pattern lithographically. LEEDUS, a fabrication process combining lithography, electroplating, batch mode micro electro-discharge machining (µEDM) and batch mode micro ultrasonic machining (µUSM), is presented in this paper. This technology provides die-scale pattern transfer capability from l...

This paper reports a self-aligned three-dimensional process (3D-SOULE) that incorporates batch-mode micro ultrasonic machining (μUSM), lapping and micro electro-discharge machining (μEDM) for fabrication of concave and mushroom-shaped spherical structures from hard and brittle materials. To demonstrate the process, 1 mm structures are fabricated from glass and ruby spheres. The μEDM technique i...

This paper studies micro structure fabrication by means of a textured tool cutting edge, which is manufactured by applying the wire cut electrical discharge machining (WEDM). Machining performance of the square structure fabrication on the tool cutting edge is investigated in the WEDM process, and the machining accuracy is explored in experimental analyses. In this proposed method, undesired ov...

A unique micro electrochemical machining (ECM) method based on a scanning micro electrochemical flow cell (SMEFC), in which the electrolyte is confined beneath the tool electrode instead of spreading on the workpiece surface, has been developed and its feasibility for fabricating mesoscale channels has been investigated. The effects of the surface conditions, the applied current, the feed rate,...

The excimer laser machining has been widely applied to micromachining of various materials. An excimer laser dragging process to ablate a groove pattern on a polycarbonate (PC) sheet through a mask opening is analyzed in this paper. Currently, a large number of papers studying the interaction between the laser machining parameters and various materials are presented. However, the prediction of ...

Magnesium based metal matrix composite (Mg/MMC) has been widely used in various area such as aerospace and automobile due to its light weight and better mechanical properties. However the heterogeneous structure and high abrasiveness particles make it to become a difficult-to-cut material especially in micro scale machining, several critical issues in machining process become prominent with the...

In this paper, fuzzy logic integrated with the Taguchi method is used to optimize Wire Electro Discharge Machining (WEDM) process with multiple quality characteristics. Rough machining with EDM gives poor surface finish and has micro cracks and pores. Finish machining gives better surface finish but with very poor machining speed (MRR). Spark gap width is one of the important performance measur...

This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyr...