Micromechanical (or “μmechanical) communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Receiver architectures are then proposed that best harness the tiny size, zero dc power dissipation, and ultra-high-Q of vibrating μmechanical re...

This paper presents high-Q thermally actuated micromechanical resonators suitable for sensory applications under atmospheric pressure. Single crystal silicon resonators with resonance frequencies in the 250 KHz to 1.5MHz range were fabricated using a single-mask fabrication process on SOI substrates. The resonators were operated in a one-port configuration in their in-plane resonance mode with ...

With Q’s in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as IC-compatible tanks for use in the low phase noise oscillators and highly selective filters of communications subsystems. To date, LF oscillators have been fully integrated using merged CMOS+microstructure technologies, and bandpass filters consisting of spring-coupled micromechanical resonators ha...

In order to measure the nonlinear features of micromechanical resonators, a free damped oscillation method based on stair-stepped frequency sinusoidal pulse excitation is investigated. In the vicinity of the resonant frequency, a frequency stepping sinusoidal pulse sequence is employed as the excitation signal. A set of free vibration response signals, containing different degrees of nonlinear ...

With Q’s in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as integratedcircuit-compatible tanks for use in the low phase-noise oscillators and highly selective filters of communications subsystems. To date, LF oscillators have been fully integrated using merged CMOS/microstructure technologies, and bandpass filters consisting of spring-coupled micromechanica...

Encapsulated bulk mode microresonators in the megahertz range are used commercial timekeeping and sensing applications but their performance is limited by current state of art readout methods. We demonstrate a using dispersive coupling between high-Q encapsulated micromechanical resonator lumped element microwave that implemented with commercially available components standard printed circuit b...