the growth rate and uniformity of carbon nano tubes (cnts) based on chemical vapor deposition (cvd) technique is investigated by using a numerical model. in this reactor, inlet gas mixture, including xylene as carbon source and mixture of argon and hydrogen as  carrier gas enters into a horizontal cvd reactor at atmospheric pressure. based on the gas phase and surface reactions, released carbon...

Thin film coatings have been essential in development of several micro and nano-scale devices. To realize thin film coatings various deposition techniques are employed, each yielding surface morphologies with different characteristics of interest. Therefore, understanding and control of the surface growth is of great interest. In this paper, we devise a novel network-based modeling of the growt...

Photonic crystals have demonstrated potential for application in many fields and devices. We demonstrate practical fabrication of three-dimensional photonic crystals using the glancing angle deposition thin film fabrication technique. Optical characterization provides strong evidence for the existence of a complete photonic band gap in three dimensions, centered at 1.6 m. We also investigate th...

Acknowledgements I would like to dedicate this work to my caring, supportive, and devoted wife, Amy. I would also like to thank my parents and family for their continued encouragement throughout my education. In addition, I would like to thank Professors Uday Pal and Roger Kamm for their time, expertise, and guidance. Abstract Table of Symbols Chapter 1.0

A zero-order semiempirical model has been developed for chemically enhanced physical vapor deposition CEPVD , a recently developed hybrid approach to film deposition offering the step coverage of chemical vapor deposition while maintaining film quality similar to films produced by ionized physical vapor deposition IPVD . CEPVD is done by introducing a chemical precursor to the substrate during ...

A condensed phase of zirconium monoxide (ZrO) was detected in YSZ (Zr0.92Y0.08O2-δ) coatings deposited using plasma spray-physical vapor deposition. The rapid cooling rate this process can result the condensation nonequilibrium states that be kinetically trapped coatings. columnar microstructure contained a mixture YSZ, ZrO2, and ZrO phases. expected to conductive based on density functional th...

The direct simulation Monte Carlo (DSMC) method is applied here to model the electron-beam (e-beam) physical vapor deposition of copper thin films. A suitable molecular model for copper-copper interactions have been determined based on comparisons with experiments for a 2D slit source. The model for atomic copper vapor is then used in axi-symmetric DSMC simulations for analysis of a typical e-b...

In this paper, a kind of multi-disciplinary simulation and design platform for wafer manufacturing process with Chamber system is presented. This platform is developed as an in-house program, with different functional component for multi-disciplinary problems, which can drive the commercial FEM solver with code. There are also management function for user, products, and analysis or optimization...