--MEMS based mass sensors are being designed to identify the small amounts of materials especially for monitoring the food supply. The Fabrication of MEMS includes deposition of material layers, pattering by photolithography and etching to produce the required shapes, consequently leading to time taking and expensive method. In order to reduce the working time of sensor to market a Finite eleme...

This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress induced moment, and then applied to the microcantilever free end to produce deflection. The stress an...

The fabrication and structural characterization of a surface micromachined, resonant frequency, Pb(Zr, Ti)O3 (PZT) microcantilever will be presented. The PZT microcantilever was fabricated using surface micromachining techniques, and used a low-stress silicon nitride thin film as the base material for the microcantilever onto which a PZT thin film was incorporated. The PZT thin film is used as ...

Resonant cantilever based on piezoelectric materials is one of the most promising platforms for real-time humidity sensing. In this letter, we propose a sensor an AlN microcantilever with high-order resonant mode and sensing layer MoS 2 . The top electrode designed into two groups segmented elec...

A Cu2+/l-cysteine bilayer-coated microcantilever undergoes bending upon exposure to dimethyl methyl phosphonate at concentration as low as 10-15 M due to the complexation of a phosphonyl group with the Cu2+/l-cysteine bilayer on the microcantilever surface.

We have developed a simple, low-cost electronic interface suitable for use with piezoresistive microcantilever-based sensors. This interface uses the USB bus of any computer or laptop to communicate with the sensor via SPI commands. The primary user interface is LabView. We have used this system with several “embedded” piezoresistive microcantilever sensing applications, including both liquid-p...

Here, we report a new approach of glucose measurement by using a multilayer modified microcantilever. Glucose oxidase (GOx)/ polyethyleneimine (PEI) multilayer modified microcantilever underwent bending when it was exposed to glucose solutions. The magnitudes of bending were proportional to the concentrations of glucose. This technique provides a new platform for enzyme functionalized cantileve...

We report the development of scanning thermoreflectance thermometry and its application for steady and dynamic temperature measurement of a heated microcantilever. The local thermoreflectance signal of the heated microcantilever was calibrated to temperature while the cantilever was under steady and periodic heating operation. The temperature resolution of our approach is 0.6 K, and the spatial...

A potential novel binding assay based on binding-driven micromechanical motion is described. A membrane preparation containing 5-HT(3AS) receptors was used to modify a microcantilever. The modified microcantilever was found to bend on application of the naturally occurring agonist (5-hydroxytryptamine, which is also called serotonin) or the antagonist MDL-72222, but not to other similar molecul...