نتایج جستجو برای: plasma deposition
تعداد نتایج: 439546 فیلتر نتایج به سال:
Three-dimensional (3D) networks of carbon nanotubes (CNTs) were fabricated on a pillarpatterned substrate by plasma-enhanced chemical vapor deposition (PECVD). To fabricate 3D networks of CNTs, highly crystalline single-walled CNTs (SWCNTs) should be synthesize on the substrate. PECVD has advantages for low temperature growth and alignment of CNTs on the substrate, but it is difficult to synthe...
*Correspondence: Andrew Michelmore, Mawson Institute, Building V, Mawson Lakes Campus, University of South Australia, Mawson Lakes, 5095, SA, Australia e-mail: andrew.michelmore@ unisa.edu.au Plasma enhanced chemical vapor deposition (PECVD) can be used to fabricate surfaces with a wide range of physical and chemical properties and are used in a variety of applications. Despite this, the mechan...
A magnetically enhanced plasma chemical vapor deposition (MEPCVD) system has been developed for the deposition of DLC ®lm without deterioration of the ®lm quality. A perpendicular magnetic ®eld (B) to the electric ®eld was applied in the RF capacitively coupled plasma enhanced (PE) CVD system. Signi®cantly higher levels of ionization are achieved in the MEPCVD system, resulting in much lower se...
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