This paper uses finite element method to obtain the optimal performance of piezoresistive microcantilever sensor by optimizing the geometrical dimension of both cantilever and piezoresistor. A 250 μm x 100 μm x 1 μm SiO2 cantilever integrated with 0.2 μm thick Si piezoresistor was used in this study. The sensor performance was measured on the basis of displacement sensitivity and surface stress...

We investigate the possibility of an electromechanical which–path interferometer, in which electrons travelling through an Aharonov–Bohm ring incorporating a quantum dot in one of the arms are dephased by an interaction with the fundamental flexural mode of a radio frequency cantilever. The cantilever is positioned so that its tip lies just above the dot and a bias is applied so that an electri...

This article describes tapping mode atomic force microscopy (AFM) using a heated AFM cantilever. The electrical and thermal responses of the cantilever were investigated while the cantilever oscillated in free space or was in intermittent contact with a surface. The cantilever oscillates at its mechanical resonant frequency, 70.36 kHz, which is much faster than its thermal time constant of 300 ...

449 Abstract Cantilever sensors have attracted considerable attention over the last decade because of their potential as a highly sensitive sensor platform for high throughput and multiplexed detection of proteins and nucleic acids. A micromachined cantilever platform integrates nanoscale science and microfabrication technology for the label-free detection of biological molecules, allowing mini...

The choice on which type of cantilever to use for Atomic Force Microscopy (AFM) depends on the type of the experiment being done. Typically, the cantilever has to be exchanged when a different stiffness is required and the entire alignment has to be repeated. In the present work, a method to adjust the stiffness in situ of a commercial AFM cantilever is developed. The adjustment is achieved by ...

This paper presents a self-actuating biosensor based on the piezoelectric cantilever optimized by Taguchi method for the label-free detection of specific biomoleculars. Until now, even though the optimisation of the cantilever-based biosensors have been performed by changing dimensions one by one, few researches have performed the geometric optimisation considering the overall configuration of ...

in recent years, demand for biological sensors which are capable of fast and accurate detection of minor amounts of pathogens inreal‑time form has been intensified. acoustic wave (aw) devices whose performance is determined by mass sensitivity parametersand quality factor are used in biological sensors as platforms with high quality. yet, current aw devices are facing many challengessuch as the...

Microcantilever platforms with integrated piezoresistors have found versatile applications in the field of clinical analysis and diagnostics. Even though treatise encompasses numerous design details of the cantilever based biochemical sensors, a majority of them focus on the generic slender rectangular cantilever platform mainly due to its evolution from the atomic force microscope (AFM). The r...

a relationship based on the modified couple stress theory is developed to investigate the flexural sensitivity of an atomic force microscope (afm) with assembled cantilever probe (acp). this acp comprises a horizontal cantilever, two vertical extensions and two tips located at the free ends of the extensions which form a caliper. an approximate solution to the flexural vibration problem is obta...

the most promising method for micro scale energy scavenging is via vibration energy harvesting which converts mechanical energy to electrical energy by the effect of coupling between electric fields and mechanical variables. using piezoelectric cantilevers is the most common method for vibration energy harvesting. changing the shape of the cantilevers can lead to changing the generated output v...