In this work, the effects of N2 addition to SF6 plasma used in isotropic silicon etching Micro-electromechanical systems (MEMS) with Au components are investigated. A four-variables Doehlert design was implemented for optimizing parameters (power, pressure, gas flow rate, and N2/SF6 ratio) maximize lateral etch rate Si using SF6/N2 mixture. The optimized condition founded a 1.8 µm/min was: powe...

A nonuniform SF6 gas flow initial condition has been actualized in the context of shock tube experiment for the Richtmyer-Meshkov instability study. Two kinds of amplitude have been used to design the membrane supports which initially materialize the gaseous interface. The visualizations of air/SF6 sinusoidal interfaces and shock wave propagations in the nonuniform field were obtained by Schlie...

With the rapid development of arts of sensors and IT, on-line monitoring of circuit breaker is now desirable and practical for electric power utilities. This paper describes a set of overall on-line monitoring systems that was developed to control and monitor the condition of SF6 circuit breaker with different type of sensors and microcomputer based controller. The aim of the developed system i...

During single-breath washouts in normal gravity (1 G), the phase III slope of sulfur hexafluoride (SF6) is steeper than that of helium (He). Two mechanisms can account for this: 1) the higher diffusivity of He enhances its homogeneous distribution; and 2) the lower diffusivity of SF6 results in a more peripheral location of the diffusion front, where airway asymmetry is larger. These mechanisms...

Since Zwilling and co-workers first introduced the electrochemical anodization method to prepare TiO2 nanotubes in 1999, it has attracted a lot of researches due to its outstanding gas response and selectivity, making it widely used in gas detection field. This review presents an introduction to the sensor applications of TiO2 nanotube arrays (TNTAs) in sulfur hexafluoride (SF6)-insulated equip...

The analysis to SF6 decomposed component gases is an efficient diagnostic approach to detect the partial discharge in gas-insulated switchgear (GIS) for the purpose of accessing the operating state of power equipment. This paper applied the Au-doped TiO2 nanotube array sensor (Au-TiO2 NTAs) to detect SF6 decomposed components. The electrochemical constant potential method was adopted in the Au-...

Despite being essential for successful infection, the molecular cues involved in host recognition and genome transfer of viruses are not completely understood. Bacterial outer membrane proteins A and C co-purify in lipid vesicles with bacteriophage Sf6, implicating both outer membrane proteins as potential host receptors. We determined that outer membrane proteins A and C mediate Sf6 infection ...

The detection of partial discharge and analysis of SF6 gas components in gas-insulated switchgear (GIS) is important for the diagnosis and operating state assessment of power equipment. The use of a Pt-doped TiO2 nanotube arrays sensor for detecting sulfur hexafluoride (SF6) decomposition products is proposed in this paper. The electrochemical pulse deposition method is employed to prepare the ...

Very low temperatures stress a circuit breaker in a complex manner. Mixed-gas circuit breakers were developed for use at temperatures as low as -50C. These breakers utilize a gas mixture of SF6 and CF4 or SF6 and N2 to prevent condensation of the SF6 gas and have been type tested at -50C to ensure travel characteristics, operating times, and gas tightness are acceptably affected. Today’s mixed-...

Concerns about atmospheric emissions of greenhouse gases and operation costs are converging to increase incentives for both the electric utility and magnesium industries to rapidly locate and repair equipment leaks (Irwin, 1997). The primary culprit is sulfur hexafluoride (SF6), an invisible, non-hazardous, inert gas with near-perfect dielectric properties that is used as an insulating gas in h...