Nano electromechanical systems NEMS become an essential part of modern sci ence and technology A number of applications is already known nanomanipu lation nanosensors medical devices nano uidic devices to name a few Even more applications are anticipated to follow the technological progress in this eld I address in this paper one of issues arising when we try to understand phenomena happened at...

Nanoelectromechanical systems (NEMS) aremade of electromechanical devices that have critical dimensions from hundreds down to a few nanometers. By exploring nanoscale effects, NEMS present interesting and unique characteristics, which deviate greatly from their predecessor microelectromechanical systems (MEMS). For instance, NEMS-based devices can have fundamental frequencies in the microwave r...

We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-dis...

In this work we study the feasibility to obtain the smallest CMOS-NEMS resonator using a sub-100 nm CMOS technology. The NEMS resonators are defined in a top-down approach using the available layers of the 65 nm CMOS technology from ST Microelectronics. A combination of dry and wet etching is developed in order to release the NEMS in an in-house post-CMOS process. Two different NEMS resonators ...

Nested effects models (NEMs) are a class of probabilistic models that were designed to reconstruct a hidden signalling structure from a large set of observable effects caused by active interventions into the signalling pathway. We give a more flexible formulation of NEMs in the language of Bayesian networks. Our framework constitutes a natural generalization of the original NEM model, since it ...

Development of efficient and sensitive motion transducers for arrays of nanoelectromechanical systems (NEMS) is important for fundamental research as well as for technological applications. Here, we report a single-wire nanomechanical transducer interface, which relies upon near-field optomechanical interactions. This multiplexed transducer interface comes in the form of a single-mode fiber tap...

The mass-spring model of electrostatically actuated microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) is pervasive in the MEMS and NEMS literature. Nonetheless a rigorous analysis of this model does not exist. Here periodic solutions of the canonical mass-spring model in the viscosity dominated time harmonic regime are studied. Ranges of the dimensionless average app...

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explaine...

Optical interferometric displacement detection techniques have recently found use in the study of nanoelectromechanical systems (NEMS). Here, we study the effectiveness of these techniques as the relevant NEMS dimensions are reduced beyond the optical wavelength used. We first demonstrate that optical cavities formed in the sacrificial gaps of subwavelength NEMS enable enhanced displacement det...