نتایج جستجو برای: sputter deposition

تعداد نتایج: 97899  

Journal: :Materials advances 2022

RF magnetron sputter deposition was performed using an Li 2 O + LiCl powder target. The resulting solid electrolyte films were found to contain a small volume fraction of 3 OCl-type antiperovskite phase.

2009
J T Gudmundsson P. Sigurjonsson Petter Larsson Daniel Lundin Ulf Helmersson J. T. Gudmundsson P. Larsson D. Lundin

2015
Santiago Silvestre Alfredo Boronat

This work reports fabrication details of heterojunction diodes and solar cells obtained by sputter deposition of amorphous GaAs on p-doped single crystalline Si. The effects of two additional process steps were investigated: A hydrofluoric acid (HF) etching treatment of the Si substrate prior to the GaAs sputter deposition and a subsequent annealing treatment of the complete layered system. A t...

2001
X. W. ZHOU H. N. G. WADLEY R. A. JOHNSON D. J. LARSON N. TABAT A. CEREZO A. K. PETFORD-LONG G. D. W. SMITH P. H. CLIFTON R. L. MARTENS T. F. KELLY

A combined theoretical and experimental approach has been used to study nanoscale CoFe/Cu/CoFe multilayer films grown by sputter deposition. Such films have applications in sensors that utilize the giant magnetoresistance effect, for example, read heads in high-density information storage devices. Atomistic simulations based on a molecular dynamics approach and an alloy form of the embedded ato...

2008

The Target Group has recently begun to apply ion beam sputter deposition for target pusher layer fabrication. Metal deposition on both levitated and stalk-mounted fusion targets has been demonstrated. We believe this is the first application of this versatile deposition technique to IF target pusher layerfabrication. Our initial results indicate that ion beam sputtering is far more controllable...

Journal: :Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 1997

Journal: :Plasma Processes and Polymers 2009

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