This paper reports on a practical modification of the two-step time-multiplexed plasma etching recipe (also known as the Bosch process) to chieve high aspect-ratio sub-micron wide trenches in silicon. Mixed argon and oxygen plasma depassivation steps are introduced in between the assivation and etching phases to promote the anisotropic removal of the passivation layer at the base of the trench....

OBJECTIVE Although self-etching bonding systems (SES) are indicated to prepare dental enamel for bonding, concerns have been expressed regarding their effectiveness. The aim of this study was to analyze the etching pattern (EP) of nine SES in comparison with 35% and 34% phosphoric acid etchants (FA) on intact (IN) and ground (GR) enamel surface. MATERIALS AND METHODS Twenty-two human third mo...

We report a simple and general procedure to create arrays of atomically flat terraces on single crystal surfaces. Facets of three-dimensional (3D) metal islands formed after hetero-epitaxial growth are often flat and, through annealing or growth at elevated temperature, the formation of rather large (micron-scale) atomically flat-top facets can be promoted. We find that the step-free nature of ...

PVD diamond-like-carbon (DLC) coatings are finding increasing industrial acceptance in automotive, aerospace and medical applications due to their reduced friction and low wear coefficient. Very recently, High Power Impulse Magnetron Sputter (HIPIMS) sources have been shown to produce fluxes with very high metal ion fractions similar to those produced by arc evaporation sources, without showing...

A new method is reported to form metal nanoparticles by sputter deposition inside a reactive ion etching chamber with a very short target-substrate distance. The distribution and morphology of nanoparticles are found to be affected by the distance, the ion concentration, and the sputtering time. Densely distributed nanoparticles of various compositions were fabricated on the substrates that wer...

Since the discovery of graphene, the quest for two-dimensional (2D) materials has intensified greatly. Recently, a new family of 2D transition metal carbides and carbonitrides (MXenes) was discovered that is both conducting and hydrophilic, an uncommon combination. To date MXenes have been produced as powders, flakes, and colloidal solutions. Herein, we report on the fabrication of ∼1 × 1 cm2 T...