نتایج جستجو برای: thermal chemical vapor deposition

تعداد نتایج: 673952  

1996
Andrew J. Newman

In Part II of this paper we present some elementary examples of distributed parameter system model reduction using the techniques described in Part I. In particular, we focus on using the Karhunen-Loeve expansion and Galerkin's method to formulated reduced order models for a heat diiusion system and temperature eld dynamics in a Rapid Thermal Chemical Vapor Deposition reactor. Simulation result...

Journal: :Microelectronics Journal 2004
B. Díaz J. A. Rodríguez M. Riera Andreu Llobera C. Domínguez Joaquín Tutor-Sánchez

In this work optical properties of SiOX ð0 , X , 2Þ layers obtained by plasma enhanced chemical vapor deposition are studied. Infrared spectra and refractive index dependences with the reactant gases flow ratio R are explained for as deposited, aged and thermally treated samples in the R range from 9.17 to 110. Variations are found to be influenced mainly by sample stoichiometry, density and Si...

ژورنال: مواد پرانرژی 2020

 Nitride compounds are among the most important and widely used compounds in life. The high chemical, thermal and mechanical stability of nitride compounds is due to the interaction of two factors, such as very strong bonds between the elements and the existence of completely covalent structures. Triphosphorus pentanitride (P3N5) is an important nitride compound. Three structures of alpha, gamm...

2009
Cheng Qian Hang Qi Jie Liu

The Journal of Physical Chemistry C is published by the American Chemical Society. 1155 Sixteenth Street N.W., Washington, DC 20036 Article Effect of Tungsten on the Purification of Few-Walled Carbon Nanotubes Synthesized by Thermal Chemical Vapor Deposition Methods Cheng Qian, Hang Qi, and Jie Liu J. Phys. Chem. C, 2007, 111 (1), 131-133 • DOI: 10.1021/jp064139t Downloaded from http://pubs.acs...

2007
Yangquan Chen Jian-Xin Xu Changyun Wen

A high-order terminal iterative learning control (ILC) scheme is proposed where only the terminal output tracking error instead of the entire output trajectory tracking error is used to update the control proole. A convergence condition is obtained for a class of uncertain discrete-time time-varying linear systems. An application example is presented, by simulation, for a rapid thermal processi...

2014
J. He J. C. Jiang

Perovskite BaTiO3 thin films have a wide range of applications for advanced devices. Especially, epitaxial BaTiO3 thin films are highly desirable for these advanced applications. So far, such epitaxial BaTiO3 films have been successfully fabricated on different single-crystal substrates using various deposition techniques including RF magnetron sputtering, molecular beam epitaxy, metallorganic ...

نمودار تعداد نتایج جستجو در هر سال

با کلیک روی نمودار نتایج را به سال انتشار فیلتر کنید