Ultrashort pulses were produced at 248 nm by using a transverse-discharge KrF* excimer laser as a high-energy amplifier system. Input pulses for the amplifier system were obtained by upconverting the output of a modelocked visible dye laser to the ultraviolet by using nonlinear crystals. Pulses of up to 20 mJ; in energy with 10-30-psec duration were obtained at 10 pulses/sec. The output pulse w...

This is the first report, to our knowledge, of refractive-index grating side writing in 10 mol.% GeO(2)-doped fiber by the near-UV light of a cw Ar(+) laser (333-364 nm). An induced-index magnitude as large as 1.9 x 10(-4) at 1.7x10(5) W/cm(2) UV power density has been achieved. The observed gratings have exhibited the same temperature stability as gratings written by a KrF excimer laser (248 nm).

Subpicosecond vacuum-ultraviolet radiation at 155 nm with pulse energies above 0.2 mJ has been obtained by near-resonant four-wave difference-frequency mixing in a Xe gas jet. Laser fields for the mixing process have been generated by a short-pulse KrF dye excimer laser system and a Raman converter. The process permits tuning in a broad vacuum-ultraviolet range and can be scaled up to higher ou...

The methoxy free radical has been formed in a supersonic free jet expansion by KrF photolysis of methyl nitrite. Its laser-induced fluorescence excitation and wavelength-resolved-emission _spectra have been recorded at low temperature. This paper reports the vibronic analysis of the C H 3 0 and CD30 A2Al XZE electronic spectra. A new value for the electronic origin has been determined as well a...

Resent technical progress of laser technologies for microlithography is discussed here. The performance of highly durable 2kHz KrF excimer laser, and next generation light source of 2kHz ArF excimer laser, which are realized by the new technologies, are discribed. We also discuss about its impact on microlithography. Further more F2 laser development program in Japan and its latest result which...

Neutral fragments from a nanosecond KrF excimer laser-ablated carbon fiber reinforced plastic (CFRP, carbon fiber/epoxy resin composite) were investigated by laser-ionization time-of-flight (TOF) mass spectrometry in order to explore the laser ablation dynamics of CFRP. The neutrals were detected after the post-ionization by an ArF excimer laser pulse at variable delay times, td, relative to th...