Anatase TiO2 thin films were deposited in a d.c. reactive magnetron sputtering system. It was found that there is a strong dependence between anatase-rutil structures of TiO2 films and the technological conditions, the most relevant parameter being the oxygen percentage from the argon and oxygen mixture. Our measurements carried out for electrical properties of d.c. magnetron sputtering TiO2 th...

In this paper, we present numerical results obtained from a robust, locally conformal 3-D Orthogonal Grid Finite Difference (OGFD) thermal algorithm introduced in Part I of our current investigation [Al-Rizzo et al., 2006] integrated with an Orthogonal Grid Finite-Difference Time Domain (OGFDTD) scheme [Al-Rizzo et al., 2000], which accurately models the volumetric electromagnetic (EM) power de...

Related Articles Low-temperature oriented growth of vanadium dioxide films on CoCrTa metal template on Si and vertical metal–insulator transition J. Vac. Sci. Technol. A 30, 051502 (2012) Phase formation and film morphology of ultrathin Co1−xNixSi2 films J. Vac. Sci. Technol. A 30, 050602 (2012) Magnetron-sputter epitaxy of β-FeSi2(220)/Si(111) and β-FeSi2(431)/Si(001) thin films at elevated te...

The magnetrons used in microwave ovens operate on the same frequency band as Wi-Fi equipment, and the radiation they release can interfere with the operation of wireless networks. This paper presents a multiphysics simulation of a magnetron using CST STUDIO SUITE®, with the aim of testing the electrical, magnetic, thermal and mechanical characteristics of a low-interference magnetron design. Th...

We analyze the motion of an electron in the crossed electromagnetic field of the planar magnetron. Numerically we calculate the parameters of cycloid along which electron moves. We determine the total power of radiation of an electron moving in the magnetron and the power spectrum generated by a single electron and by the system of N electrons moving coherently in the electromagnetic field of p...

Related Articles From sponge to dot arrays on (100) Ge by increasing the energy of ion impacts J. Vac. Sci. Technol. B 30, 06FF12 (2012) Ion-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films J. Vac. Sci. Technol. A 30, 061512 (2012) Negative oxygen ion formation in reactive magnetron sputtering processes for transparent conductive oxides J. Vac. Sci...

TomoTherapy Quality Assurance (TQA) is a software package developed to monitor certain aspects of machine performance. In this study, the TQA quantities or data trends most effective in monitoring energy drifts and magnetron stability were determined respectively. This retrospective study used data collected from three TomoHD units. The TQA modules investigated were Step-Wedge Helical, Step-Wed...

The scope of this licentiate thesis is the investigation of carbon based thin films suitable for rolling components, especially roller bearings. Carbon and carbon nitride are materials with advantageous tribological properties and high resiliency. Such materials are required in order to withstand the demanding conditions of bearing operation, such as high loads and corrosive environments. A fun...

Low-pressure plasmas offer a unique possibility of confinement, control, and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field, and new applications of plasma-processed dust particles are emerging. During the deposition of thin amorphous films onto melamine formaldehyde (MF) microparticles in a C2H2 plasma, the generation of nanosized carbon particles was ...

The conventional microwave oven with the 2.45 GHz “cooker” magnetron producing output microwave power of 0.7-1.0 kW has become de-facto one of the “must-have” from the long line of different kitchen appliances available for everyday use in every single US home or office. A problem has arisen, however, during the last 10 years with the rise of numerous wireless systems, most notable of which is ...