We report the application of energy dispersive X-ray diffraction (EDXRD) to residual strains depth profiling. Extremely tight incident/diffracted b!"#$ %&''(#")(&*$ +,-.$ /#0$ is used to define a fixed micro-scattering-volume, through which the specimen is scanned to produce the profiling. Exhaustive theoretical modeling of the experiment provides outstanding agreement with the observed results...

Atomic mixing and preferential sputtering impose a depth resolution limit on the use of sputter sectioning to measure the composition of metal-semiconductor interfaces. Experimental evidence obtained with the Pt-Si system is used to .demonstrate ion-induced atomic mixing and then its effect on sputter etching and depth profiling. Starting with discrete layer structures, a relatively low ion dos...

This paper presents applications of the laser induced shear wave directivity pattern in the thermoelastic regime, to the detection and the in-depth profiling of overthickness and closed cracks perpendicular to the surface. Some results on academic samples and first measurements of actual depth profilings of welds are presented and discussed.