The pull-in voltage of a single-side anchored freestanding beam, under lateral deflection, has been investigated for application as a dc voltage reference. Two sets of electrodes, alongside the tip, are used for parallel-plate type of electrostatic actuation of the 200 m long beam in the plane of the wafer. Another set of buried electrodes is aligned with the plate electrode at the free-standin...

An electrostatic torsion micromirror is designed using the optimized spring-shaped torsion beams and U-shaped groove supporters. The main advantages of this design will be a reduction in the pull-in voltage for low-voltage applications and the function as a switch of the instability mode by adjusting the effective bending stiffness of the torsion beam. In this design, a theoretical model is dev...

This paper presents a study on the frequency response of a capacitive micro-beam resonator under various applied stresses. The governing equation whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear electrostatic equation. Due to the nonlinearity and complexity of the derived equation analytical solution are not generally available; therefore, the ...

the natural frequency and pull-in instability of clamped-clamped nano-actuators in the presence of a dielectric layer are analyzed. the influence of the presence of casimir force, electrostatic force, fringing field effect, axial force, stretching effects and the size effect are taken into account. the governing equation of the dynamic response of the actuator is transformed in a non-dimensiona...

A voltage regulator is developed to extend the operation range of a electrostatic actuator using a displacement feedback. The feedback actuator system can be used for continuous position tracking of step, ramp, or harmonic voltage signals. The electrostatic actuator is composed of a micro-cantilever beam electrode above a fixed electrode. The voltage difference between the two electrodes is reg...

power system blackouts have become a serious problem for electric utilities especially in recent years. different forms of system instability have emerged in recent blackouts, such as voltage instability and frequency instability. to counteract each form of system instability, special algorithms have been designed in the protection system, e.g. under frequency load shedding (ufls) and under vol...

in methods presented to calculate the voltage collapse point, the transmission system is usually the only part of the power system that is completely modeled. distribution systems are often replaced by aggregate load models because the use of the detailed model of distribution systems in voltage stability analysis not only increases the computation time, but also decreases the probability of co...

We study the influence of von Karman nonlinearity, van der Waals force, and a athermal stresses on pull-in instability and small vibrations of electrostatically actuated mi-croplates. We use the Galerkin method to develop a tractable reduced-order model for elec-trostatically actuated clamped rectangular microplates in the presence of van der Waals forcesand thermal stresses. More specifically,...