Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophist...

-One of the latest manifestations of miniaturization in space applications is the development of standardized nanosatellite. Recent achievements and future trends of Micro-Electro-Mechanical Systems (MEMS) technology have indicated that microtechnology is the critical technologies of future space programs. Enabling technologies for demanding applications will surely make use of MEMS based compo...

Packaging costs of Micro-Electro-Mechanical System (MEMS) are still contributing with >50% to the total costs of most devices. Aligned wafer bonding techniques for Wafer-level packaging (WLP) demonstrates a huge potential to reduce these costs due to a smaller size of the total package, improved performance and shorter time to market. A special group of MEMS devices, Micro-OptoElectro-Mechanica...

Over the last few years an amazing amount of interest has emerged for applications of micro electro-mechanical systems (MEMS) in telecommunications. Silicon-based optical MEMS have proven to be the technology of choice for lowcost scalable photonic applications because they allow mass manufacturing of highly accurate miniaturized parts, and use materials with excellent mechanical and electrical...

The fields of micro- and nanomechanics are strongly interconnected with the development micro-electro-mechanical (MEMS) nano-electro-mechanical (NEMS) devices, their fabrication applications. This article highlights biomimetic concept designing new nanodevices for advanced materials sensing

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...

Wireless Sensor Networks (WSN) have gained wide popularity and have increased tremendously in recent time due to growth in Micro-Electro-Mechanical Systems (MEMS) technology. WSN has the potentiality to connect the physical world with the virtual world by forming a network of sensor nodes. Energy saving of sensor nodes is a major design

We have developed a new microelectromechanical logic device using the MEMS (Micro Electro Mechanical Systems) technology. This device consists simply of a single cantilever and two driving electrodes with two contact pads for electrostatic operation. Both exclusive NOR (XNOR) and exclusive OR (XOR) logic devices have been realized using this simple construction.

MEMS is an acronym for Microelectro Mechanical Systems, it defines mechanical structures fabricated with IC processing on (most often) silicon wafers. In Europe, MEMS is labeled Microsystems and in Japan it is labeled Micromachines. The term MEMS evolved in the United States in the 1990s. Prior to that period the technology was labeled silicon micromachining . MEMS defines the technology; not s...

The technical progress in key technologies as microelectronics, telecommunication and micro-electro-mechanical systems (MEMS) proceeds rapidly. Classical education at universities has to be accomplished by additional learning activities to fulfill the requirements of life-long learning in companies and research institutions. The Internet techniques offer the technical basis to provide engineers...