Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviat...

We report on a 32 × silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The is fabricated 200-mm silicon-on-insulator wafers in commercial complementary metal-oxide-semiconductor (CMOS) foundry. device has maximum on-chip loss of 7.7 dB and an extinction ratio 50.8 dB. switching voltage 9.45 V the 20-dB bandwidth 28.7 nm. Our work shows promi...

We are proposing a liquid rate gyro named “ECF micro rate gyro”. Although the sensing principle is based on that of a conventional gas rate sensor, the liquid micro rate gyro works by an electro-conjugate fluid (ECF) instead of a gas. The electro-conjugate fluid is a dielectric fluid that works as a functional fluid, generating a powerful jet flow (ECF jet) when subjected to a high DC voltage. ...

In this paper, a methodology is proposed for expediting the coupled electro-mechanical finite element modeling of electrostatically actuated MEMS. The proposed methodology eliminates the need for repeated finite element meshing and subsequent electrostatic modeling of the device during mechanical deformation. We achieve this by using an approximation of the charge density on the movable electro...

Corresponding author, Email: [email protected] ABSTRACT In this paper, we present a preliminary research effort towards an effective computer support environment for the design and development of micro-electro-mechanical systems (MEMS). We first identify the characteristics of MEMS product design and development processes and examine the state-of-the-art of MEMS Computer-aided Design (CAD) and s...

This paper proposes the result of hardware in the loop simulation (HILS) for performance evaluation about a small attitude heading reference system (AHRS) based micro electro mechanical system (MEMS) suitable for small unmanned underwater vehicle. Unmanned underwater vehicles (UUV) have many applications in scientific, military, and commercial area due to its autonomy and the navigation system ...

Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophist...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage development new generation MEMS-based is design optimization stage. However, device processes are developed a laboratory by empirical approaches. This causes time loss creates an unnecessary waste resources. ...