Abstract The focus of this study is to understand the physical phenomenon liquid-based electroactive polymer (EAP) actuator known as Hydraulically Amplified Self-Healing Electrostatic (HASEL) actuator. Specifically, provides data in several areas, including deformation film material, dynamics dielectric liquid, and electrical conditions within body. A two-dimensional model was developed finite ...

The performance of a chaotic micro resonator is improved by redesigning a quadratic controller reported in a previous study. The chaotic micro resonator is composed of an electrostatic actuator and a voltage regulator (controller). The actuator is made of cantilever beam electrode above a fixed electrode. The actuator voltage, and consequently the electrostatic force magnitude, is controlled to...

A two degree-of-freedom microrobot is designed in the Berkeley 3-layer SOI/DRIE process. The microrobot uses electrostatic actuation to minimize power consumption. To create out-of-plane motion, which translates to lateral movement for the robot, a variation on a torsional resonator is used. For inplane motion, the microrobot uses a simple electrostatic gap-closing actuator to pivot the microro...

The development of an assembly and packaging process for MEMS deformable mirrors (DMs) with through wafer via (TWV) interconnects is presented. The approach consists of attaching a DM die with high-density TWV electrostatic actuator interconnects to an interposer substrate that fans out these connections for interfacing to conventional packaging technology.

ABSTRACT The important practical and realistic design issues of an electrostatic actuator/positioner with full-gap travel are discussed. Analytic expressions and numerical simulations show that parasitic capacitances, and non-uniform deformation in two and three dimensions influence the range of travel of an electrostatic positioner stabilized by the addition of a series capacitor. The effects ...

We report an equivalent circuit model for MEMS (microelectromechanical systems) electrostatic actuator using open-source circuit simulator Qucs (quite universal circuit simulator). Electrostatic force, equation of motion, and Kirchhoff’s laws are implemented by using the EDD (equation defined device) function of Qucs. Mathematic integral operation in the equation of motion is interpreted into e...

This paper studies the principle of a novel voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. Based on these models, an analysis of design parameters and expected device performance has been performed to serve as a starting point f...

the natural frequency and pull-in instability of clamped-clamped nano-actuators in the presence of a dielectric layer are analyzed. the influence of the presence of casimir force, electrostatic force, fringing field effect, axial force, stretching effects and the size effect are taken into account. the governing equation of the dynamic response of the actuator is transformed in a non-dimensiona...