The vacuum level in micro-electro-mechanical system devices needs to be achieved and maintained using non-evaporable getter film technology. Zr–Co–RE films are deposited by direct current (DC) magnetron sputtering krypton (Kr) as the gas. influence of gas pressure DC power on microstructure adsorption characteristics is investigated. at different pressures all grow a columnar shape. Films grown...

The Divertor Tokamak Test (DTT) is a new experimental facility whose construction starting in Frascati, Rome, Italy; its main goals are improving the understanding of plasma-wall interactions and supporting development ITER DEMO. DTT will be equipped with Neutral Beam Injector (NBI) based on negative deuterium ions, designed to inject 10 MW power tokamak. A fundamental system for good operation...

Non-evaporable Ti-Zr-V ternary getters (NEGs) were studied by means of excitation energy resolved photoelectron spectroscopy (ERXPS). We attempted a quantitative study of the in-depth redistribution of the NEG components during activation. The samples were prepared ex-situ by DC magnetron sputtering on a stainless-steel substrate. The ERXPS measurements were carried out at two incident photoele...

Thin layers of pyroglutamic acid (Pygl) have been deposited by thermal evaporation of the molten L-glutamic acid (L-Glu) through intramolecular lactamization. This deposition was carried out with the versatile handmade low-vacuum coater, which was simply composed of a soldering iron placed in a vacuum degassing resin chamber evacuated by an oil-free diaphragm pump. Molecular structural analyses...

VACUUM PUMPING STUDY OF TITANIUM-ZIRCONIUM-VANADIUM THIN FILMS* Yulin Li and Simon Ho, LEPP, Cornell University, Ithaca, NY 14853, USA Abstract Vacuum pumping via non-evaporable getter (NEG) thin film deposited directly onto the interior of a vacuum chamber is a novel way to achieve extreme high vacuum. As part of R&D efforts for the proposed Energy Recovery Linac at Cornell, the pumping perfor...