串联超导量子干涉器件(superconducting quantum interference device, SQUID)阵列通过增加SQUID数量来达到提升信噪比的目的, 即SQUID电压信号随SQUID数目比例增加而总电压噪声正比于SQUID数目的平方根值. 本文介绍了利用自主工艺线进行串联SQUID阵列研究的相关研究进展, 实现了SQUID数量分别为200和800的阵列集成, 测试得到磁通噪声达到0.5 \begin{document}$ \text{μ}\varPhi _{\text{0}}/\sqrt{\text{Hz}} $\end{document}<graphic xmlns:xlink="http://www.w3.org/1999/xlink" ...

Interferometric lithography IL is an ideal technique for the parallel fabrication of large-area periodic patterns at nanometer scales. Compared to other lithography techniques, IL has the optics advantage of parallel fabrication over large areas, resulting high efficiency and low cost. By combining IL with self-aligned semiconductor processing and epitaxial techniques, complicated nanoscale str...

Many developing countries produce huge amount of agro waste. The disposal this waste is a major problem. residues like wheat and rice husk, sawdust from carpentry shops, groundnut shells, dry leaves plants are available in large quantity. Apart the problems storage, transportation easy handling waste, burning biomass grates poses greater problem widespread air pollution. Biomass pellets well-li...

A high-throughput fabrication of sub-10 nm nanogap electrodes combined with solid-state nanopores is described. These devices should allow concomitant tunneling and ionic current detection of translocating DNA molecules. We report the optimal fabrication parameters in terms of dose, resist thickness, and gap shape that allow easy reproduction of the fabrication process at wafer scale. The devic...

Colloidal phase-shift lithography, the illumination of a two-dimensional (2D) ordered array of self-assembled colloidal nanospheres, is an effective method for the fabrication of periodic three-dimensional (3D) nanostructures. In this work, we investigate the design and control of the unit-cell geometry by examining the relative ratio of the illumination wavelength and colloidal nanosphere diam...

The authors present highly selective emitters based on two-dimensional tantalum (Ta) photonic crystals, fabricated on 2 in. polycrystalline Ta substrates, for high-temperature applications, e.g., thermophotovoltaic energy conversion. In this study, a fabrication route facilitating large-area photonic crystal fabrication with high fabrication uniformity and accuracy, based on interference lithog...