The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...

Gyroscopes are used as rotation rate sensors. Conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. Micro-gyroscopes have solved these problems due to their small size. The beam micro-gyroscope is one of the popular types of inertial sensors. Their small dimensions and low energy consumption are key reasons for their popul...

Functionalized nanoporous materials have been developed recently as bio/chemical sensing materials. Due to the huge specific surface of the nano-materials for molecular adsorption, high hopes have been placed on gravimetric detection with micro/nano resonant cantilevers for ultra-sensitive sensing of low-concentration bio/chemical substances. In order to enhance selectivity of the gravimetric r...

In this paper, the flexural free vibrations of three dimensional micro beams are investigated based on strain gradient theory. The most general form of the strain gradient theory which contains five higher-order material constants has been applied to the micro beam to take the small-scale effects into account. Having considered the Euler-Bernoulli beam model, governing equations of motion are w...

This study developed a finite element model according to higher-order shear deformation beam theory (HSDT) for the buckling analysis of functionally graded (FG) beams. Equilibrium equations FG are obtained from Lagrange’s equations. The be discussed within scope has 5 nodes and 16 degrees freedom (DOF). As result analysis, critical load was various boundary conditions, power-law index (p), slen...

In this paper, the size dependent behavior of the gold micro-switches has been studied. This behavior becomes noticeable for a structure when the characteristic size such as thickness or diameter is close to its internal length-scale parameter. The size dependent effect is insignificant for the high ratio of the characteristic size to the length-scale parameter, which is the case of the silicon...

The aim of this paper is to study the electro-mechanical coupling responses functionally graded (FG) piezoelectric cantilever nanobeam under concentrated load, and material properties follow an exponential distribution in thickness direction. constitutive equations are derived from electric Gibbs free energy density function. governing boundary conditions Euler–Bernoulli FG beam can be obtained...

Abstract Nano-kirigami method enables rich diversity of structural geometries that significantly broaden the functionalities optical micro/nano-devices. However, methodologies various nano-kirigami are still limited and as a result, chiral structure has yet been pushed to limit for operation at visible wavelength region. Here, merits strategies comprehensively explored bio-inspired nano-cilia m...

Fluorinated graphene/ultra high molecular weight polyethylene (FG/UHMWPE) composites were prepared by ultrasonic dispersion and hot pressing. The mechanical propertys and tribological property of pure UHMWPE and FG/UHMWPE composites were investigated by micro hardness tester and high-speed reciprocating friction tester. The wear volume of the sample was measured by the scanning electron microsc...