نتایج جستجو برای: mems vacuum sensor
تعداد نتایج: 241773 فیلتر نتایج به سال:
In this paper, a beam-membrane (BM) sensor for measuring friction torque in micro-electro-mechanical system (MEMS) gas bearings is presented. The proposed sensor measures the force-arm-transformed force using a detecting probe and the piezoresistive effect. This solution incorporates a membrane into a conventional four-beam structure to meet the range requirements for the measurement of both th...
According to the demands of current pipeline detection systems, the above-ground marker (AGM) system based on sound detection principle has been a major development trend in pipeline technology. A novel MEMS acoustic vector sensor for AGM systems which has advantages of high sensitivity, high signal-to-noise ratio (SNR), and good low frequency performance has been put forward. Firstly, it is pr...
The trend of integrating nanostructure to elevate the MEMS capability is becoming a trend in microelectronic sensor field. Critical functional element of sensors in the scale of 10 -6 and 10 -9 m in any dimension being incorporated with appropriate nanostructure as part of the sensor systems through two basic approaches: topdown and bottom up. The techniques and methods of both approaches will ...
Response to mechanical stimuli largely dictates cellular form and function. A host of extraordinary yet unexplained responses have been identified within the hierarchical cell structure. As experimental and model-based investigations in cell mechanics advance, the underlying structure-function mechanisms dictating these responses emerge. Here we explore the potential of microelectromechanical s...
We introduce the behavior of the electrical output response of a magnetic field sensor based on microelectromechanical systems (MEMS) technology under different levels of controlled magnetic noise. We explored whether a particular level of magnetic noise applied on the vicinity of the MEMS sensor can improve the detection of subthreshold magnetic fields. We examined the increase in the signal-t...
Three-axis-magnetometers (TAMs) are widely utilized as a key component of attitude determination subsystems and as such are considered the corner stone of navigation for low Earth orbiting (LEO) space systems. Precise geomagnetic-based navigation demands accurate calibration of the magnetometers. In this regard, a complete online calibration process of TAM is developed in the current research t...
The packaging of microelectromechanical systems (MEMS) is complex and it is essential to the successful commercialization of many MEMS devices. In this paper, a pressure sensor and an actuator were assembled on a flexible substrate using FCOF technology. A photolithography process was developed to meet the solder bump fabrication requirement of the sensor chip. Eutectic solder bumps (63Sn/37Pb)...
In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...
In the last few years several types of MEMS-based spectrometer systems emerged, mainly addressing the NIR spectral range. The presented MEMS-based sensor prototype operates in the mid-IR range between 2200 cm and 2500 cm. The main element is a blazed micro-electro-mechanical reflective grating device with an aperture of 3x3 mm2. The optical setup of the sensor corresponds to a Czerny-Turner typ...
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