This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...

Successful application of many implantable medical devices often depends on the technique used for attaching the devices to living tissue. Although mechanical attachment techniques that use micro-scale piercing elements are very promising, the fabrication of the micro-scale piercing elements poses considerable challenges. In this paper, the use of the mechanical micromilling process for fabrica...

Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structu...

The greatest challenge being faced for realization of Micro-Electro Mechanical System (MEMS) technology is the lack of a simple, quick and reliable method for the fabrication of 3-D microchannel in the range of micrometers. A novel fabrication technique which opens possibilities for the production of these microfluidic channels is presented in this paper. The present paper highlights the possib...

We have fabricated spherical and cylindrical concave micro-mirrors in silicon with dimensions from 20 microm to 100 microm. The fabrication process involves standard photolithography followed by large area ion beam irradiation and electrochemical anodisation in a HF electrolyte. After thermal oxidation the silicon surface roughness is less than 2 nm. We also present a multilayer porous silicon ...

An inertial vibration scavenging micro-generator is described which is suitable for biomedical applications. MEMS fabrication techniques have been used to construct a variable capacitor having one moving plate on which a proof mass is attached. Energy is extracted when the plates separate at constant charge. This device is non-resonant, so can operate over a wide range of excitation frequencies...

In this paper, we describe how motile microorganisms can be integrated with engineered microstructures to develop a micro-bio-robotic system. SU-8 microstructures blotted with swarmer cells of Serratia Marcescens in a monolayer are propelled by the bacteria in the absence of any environmental stimulus. We call such microstructures with bacteria MicroBioRobots (MBRs) and the uncontrolled motion ...

This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyr...

This paper presents the design, the fabrication and the characterization of a planar interleaved microtransformer with an Yttrium Iron Garnet (YIG) core. The design of this micro-transformer and the manufacturing steps are presented. HFSS software is used for the conception and the simulation of the interleaved magnetic micro-transformer. It is composed of two identical windings. A bottom magne...

This paper reports the fabrication of a biodegradable microfluidic device based on zein, a prolamin protein derived from corn. Micro-chambers and micro-channels features have been replicated on zein films using a stereo lithography master. Enclosed zein microfluidic devices are made by bonding the zein films with microfluidic features to glass substrates using a simple vapor-deposition method. ...