This paper provides an overview of techniques compact modeling via model order reduction (MOR), emphasizing their application to cooperative microactuators. MOR creates highly efficient yet accurate surrogate models, facilitating design studies, optimization, closed-loop control and analyses interacting components. is particularly important for microactuators due the variety physical effects em...

Impact microactuators rely on repeated collisions to generate gross displacements of a microelectromechanical machine element without the need for large applied forces. Their design and control rely on an understanding of the critical transition between non-impacting and impacting long-term system dynamics and the associated changes in system behavior. In this paper, we present three co-dimensi...

This paper investigates manipulation tasks with arrays of mi-croelectromechanical structures (MEMS). We develop a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe eecient algorithms for their evaluation. The theory of limit surfaces ooers a purely geometric characterization of micro-scale contacts between actuator and moving object, wh...

This paper investigates manipulation tasks with arrays of microelectromechanical structures (MEMS). We develop a model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe e cient algorithms for their evaluation. The theory of limit surfaces o ers a purely geometric characterization of micro-scale contacts between actuator and moving object, whi...

Adaptive optics (AO) is a revolutionary technology that enhances the quality of astronomical images by correcting aberrations in them caused by atmospheric turbulence and distortions in the primary mirrors of large telescopes. The technology relies on manipulating arrays of microactuator devices mounted behind a deformable secondary mirror to correct errors in wave-fronts of incoming light. Cur...

In this paper, a selected analysis of the dynamics in an example impact microactuator is performed through a combination of numerical simulations and local analysis. Here, emphasis is placed on investigating the system response in the vicinity of the so-called grazing trajectories, i.e. motions that include zero-relative-velocity contact of the actuator parts, using the concept of discontinuity...