Dynamic add-drop filters with variable bandwidth are demonstrated on microelectromechanical-system (MEMS)-actuated microdisk resonators for what is believed to be the first time. The tuning mechanism is based on a variable power coupling ratio that is controlled by varying the gap spacing between the waveguide and the microdisk through MEMS actuators. The results show wavelength switching with ...

We previously reported optical true-time delay devices, based on the White cell, to support phased-array radars. In particular, we demonstrated a quadratic device, in which the number of delays obtainable was proportional to the square of the number of times the light beam bounced in the cell. Here we consider the possibilities when a microelectromechanical (MEM) tip/tilt mirror array with mult...

Instrumentation for high-speed imaging and laser vibrometry is essential for the understanding and analysis of microstructure dynamics, but commercial instruments are largely unaffordable for most microelectromechanical systems (MEMS) laboratories. We present the implementation of a very low cost in-plane micro motion stroboscopic analyzer that can be directly attached to a conventional probe s...

ome of the highlights of the ongoing program within the Sensor Science Group of APL’s Milton S. Eisenhower Research and Technology Development Center to develop novel magnetometers are summarized. In particular, two approaches are described: a magnetostrictive device based on the deflection of a Terfenol-D coated single-crystal silicon cantilever and a Lorentz-force device based on a classical ...

In advanced microsystems various types of devices (metal-oxide semiconductor field-effect transistors, bipolar transistors, sensors, actuators, microelectromechanical systems, lasers) may be on the same chip, some of which are 3D structures in nature. Therefore, not only materials combinations (integrated materials) are required for optimal device performance of each type but also process techn...

A microelectromechanical systems (MEMS) thermal flow sensing array constructed of biocompatible materials has been designed, fabricated, nd tested. In addition to the construction, the electronic biasing conditions were selected such that sensor operation was compatible with biological uids. The device comprises several thin film platinum sensing elements sandwiched in a Parylene C membrane. Th...

This letter demonstrates the linear dynamic range enhancement of a mode-localized microelectromechanical systems sensor based on two weakly coupled cantilevers under electrostatic actuation resulting in repulsive force. An analytical model is proposed to design sensor, and expression force obtained using finite element simulation. Compared attractive actuation, intensity less sensitive change c...

The combination of multiaxis and multiparameter microelectromechanical systems (MEMS) in the same technology would result in very cheap and smart inertial measurement units (IMUs). In this paper, a Z-axis Lorentz-force-based magnetometer whose design and optimization are reviewed taking into account the constraints of an industrial MEMS technology (process and packaging) already used for accele...

Achieving superior outcomes through the use of robots in medical applications requires an integrated approach to the design of the robot, tooling and the procedure itself. In this paper, this approach is applied to develop a robotic technique for closing abnormal communication between the atria of the heart. The goal is to achieve the efficacy of surgical closure as performed on a stopped, open...