This article deals with the development of an original sample preparation method for transmission electron microscopy (TEM) using focused ion beam (FIB) micromachining. The described method rests on the use of a removable protective shield to prevent the damaging of the sample surface during the FIB lamellae micromachining. It enables the production of thin TEM specimens that are suitable for p...

This paper presents the design, fabrication and “on wafer” characterization of membrane-supported YagiUda CPW fed antenna structures. The antennas were designed for the 60 GHz and 77 GHz frequency operating ranges. The 60 GHz antennas were fabricated on a semi-insulating GaAs membrane using GaAs micromachining. The 77 GHz antennas were manufactured on 1.4 μm thin SiO2/Si3N4 membranes obtained b...

A silicon micromachining method that is able to create deep silicon dioxide blocks at selected locations in a silicon substrate is presented. The process combines deep-reactive-ion etching (DRIE), thermal oxidation, deposition of silicon dioxide and optional planarization. Design issues and parameters for the creation of such blocks are discussed. The selectively defined silicon dioxide blocks ...

This paper discusses the use of high power lasers in the manufacture of microelectromechanical systems (MEMS). The ability to process a wide range of materials, and to produce truly three-dimensional structures with tolerances at the micron or sub-micron level, give laser micromachining some key advantages over other more established micromachining techniques. Previous work in this area is revi...

Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Using a silicon nitride membrane under tension, within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, with square aperture of up to 2x2 mm and an electrostat...