Micromechanical radial-contour mode disk resonators featuring new self-aligned stems have been demonstrated with record resonance frequencies up to 1.14 GHz and measured Q’s at this frequency >1,500 in both vacuum and air. In addition, a 733-MHz version has been demonstrated with Q’s of 7,330 and 6,100 in vacuum and air, respectively. For these resonators, self-alignment of the stem to exactly ...

The use of constrained thermal expansion to tune the resonant frequency of vibrating micromechanical resonators is explored. A simple model is developed to predict the power sensitivity obtained with folded and unfolded geometries, including the effects of electrothermal heating, and conduction and convection cooling. It is shown that the sensitivity of folded structures can change sign as the ...

The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantilever working in dynamic mode, adjust its resonance frequency depending on changes in both, the spr...

Capacitively transduced micromechanical disk resonators that exhibit simultaneous low motional resistance (< 130 Ω) and high Q (>70,000) at 61 MHz are demonstrated using an improved ALDpartial electrode-to-resonator gap filling technique that reduces the Q-limiting surface losses of previous renditions by adding an alumina pre-coating before ALD of the gap-filling high-k dielectric. This work i...

Current research on micromechanical resonators strives for quantum-limited detection of the motion of macroscopic objects. Prerequisite to this goal is the observation of measurement backaction consistent with quantummetrology limits. However, thermal noise currently dominates measurements and precludes ground-state preparation of the resonator. Here, we establish the collective motion of an ul...

We experimentally study forced and self-excited oscillations of an optomechanical cavity, which is formed between a fiber Bragg grating that serves as a static mirror and a freely suspended metallic mechanical resonator that serves as a moving mirror. In the domain of small amplitude mechanical oscillations, we find that the optomechanical coupling is manifested as changes in the effective reso...

Measurement and feedback control of stochastic dynamics has been actively studied for not only stabilizing the system but also generating additional entropy flows originating in information flow controller. In particular, a micromechanical offers great platform to investigate such non-equilibrium under measurement-feedback owing its precise controllability small fluctuations. Although various t...

A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheri...