The development of a novel, fully integrated, miniaturized pumping system for generation of pressure-driven flow in microfluidic platforms is described. The micropump, based on electroosmotic pumping principles, has a multiple open-channel configuration consisting of hundreds of parallel, small-diameter microchannels. Specifically, pumps with microchannels of 1-6 microm in depth, 4-50 mm in len...

In this study, we successfully designed and tested a new micropump that utilizes an active check valve and bottom-protruding structure to achieve sample transportation. We performed theoretical analyses and numerical simulations to determine the optimal location of the active check valve. We also experimentally analyzed variations in the generated flow rate with respect to the pneumatic frequen...

Fraunhofer EMFT’s research and manufacturing portfolio includes piezoelectrically actuated silicon micro diaphragm pumps with passive flap valves. Research development in the field of microfluidics have been dedicated for many years to use micropumps generating positive negative pressures, as well delivering various media. However, some applications, only small amounts fluid need be pumped, com...