نتایج جستجو برای: nano metrology
تعداد نتایج: 55232 فیلتر نتایج به سال:
A novel cable-based metrology system is presented wherein six cables are connected in parallel from ground-mounted string pots to the moving object of interest. Cartesian pose can be determined for feedback control and other purposes by reading the lengths of the six cables via the string pots and using closed-form forward pose kinematics. This paper focuses on a sculpting metrology tool, assis...
Statistical metrology is the body of methods for understanding variation in microfabricated structures, devices, and circuits. The goal of this paper is to describe key features of statistical metrology, to review the tools and methods developed to date, and present an application of statistical metrology to advanced technology and design rule development. A running application example will be ...
As we move forward to the 45 and 32nm node, MuGFET’s (Multi-Gate Field-Effect Transistor) are considered more and more as a necessary alternative to keep pace with Moore's Law. If proven manufacturable, MuGFET’s could eventually replace conventional CMOS transistors within a few years. The ability to perform proper and extensive metrology in a production environment is then essential. We invest...
5.1.1 Vibration Detection in the Presence of a Reference Wave 5.1.2 Vibration Detection without a Reference Field 5.2 Deformation Measurement by Speckle Interferometry 5.3 In-Plane Oscillations by Image Plane Recording 5.3.1 Theory 5.3.2 Time-Average Exposures of in-Plane Oscillations 5.3.3 Display of Young's Fringes 5.3.4 Comparison of Fringe Shapes for Different Motions 5.4 Tilt Analysis by F...
Abstract Single-photon sources have a variety of applications. One these is quantum radiometry, which reported on in this paper the form an overview, specifically current state art application deterministic single photon to calibration detectors. To optimize single-photon for purpose, extensive research currently carried out at European National Metrology Institutes (NMIs), collaboration with p...
To help identify the strengths of proposed software measurement methods, this paper proposes an analytical approach based on metrology concepts documented in the ISO International Vocabulary of Basic and General Terms in Metrology. This approach is illustrated with a case study using one specific functional size measurement method recognized as an ISO standard: COSMIC-FFP (ISO 19761). The case ...
Direct metrology of coherent short-wavelength beamlines is important for obtaining operational beam characteristics at the experimental site. However, since beam-time limitation imposes fast metrology procedures, a multi-parametric metrology from as low as a single shot is desirable. Here a two-dimensional (2D) procedure based on high-resolution Fresnel diffraction analysis is discussed and app...
Modern metrology is the result of more than 200 years of development that began with the creation of the decimal metric system at the time of the French Revolution and the beginning, at about the same time, of mass production using interchangeable parts. This article traces these developments and describes how world metrology is organized today and gives examples of applications of metrology sh...
A method capable of delivering relative optical path length metrology with nanometer precision is demonstrated. Unlike conventional dual-wavelength metrology, which employs heterodyne detection, the method developed in this work utilizes direct detection of interference fringes of two He-Ne lasers as well as a less precise stepper motor open-loop position control system to perform its measureme...
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