This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1−xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various appl...

Ferroelectric materials, which exhibit switchable polarization and are piezoelectric, have been extensively studied because of their applications in nonvolatile memory and energy harvesting devices.[1,2] Recently, ferroelectric nanostructures have attracted great interest as they provide a platform to investigate the size effect of ferroelectricity and enable integration with prevailing miniatu...

This paper reports on a low frequency piezoelectric energy harvester that scavenges energy from a wire carrying an AC current. The harvester is described, fabricated and characterized. The device consists of a silicon cantilever with integrated piezoelectric capacitor and proof-mass that incorporates a permanent magnet. When brought close to an AC current carrying wire, the magnet couples to th...

In this article, we present our experience with a piezoelectric-assisted surgical device by resection of a benign fibrous histiocytoma of the mandible.A 41 year-old male was admitted to our hospital because of slowly progressive right buccal swelling. After further radiographic diagnosis surgical removal of the yellowish-white mass was performed. Histologic analysis showed proliferating histioc...

In this work, we design and fabricate a wireless system with the main operating device based on zinc oxide (ZnO) nanowires. The main operating device is based on piezoelectric nanogenerator (NG) achieved using ZnO nanowires grown hydrothermally on paper substrate. The fabricated NG is capable of harvesting ambient mechanical energy from various kinds of human motion, e.g., footsteps. The harves...

In this paper, modeling and control strategies for a new observability-optimized piezoelectric microactuator are presented. The targeted applications concern mainly the design of microgripper for micromanipulation tasks. The device has been designed using a topological optimization method, which takes into account the optimal full integration of piezoelectric actuating and sensing elements with...

Using strain devices as sensors, and using piezoelectric devices as actuators, the experimental research on the vibration control of large flexible space structures is presented in this paper. The control theory used in this experiment will be introduced. The working principles of the strain devices and the piezoelectric devices will be explained in detail in this paper. A satellite panel syste...

A thin film lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), MEMS power generating device is developed. It is designed to resonate at specific frequencies from an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our cantilever device i t 2 f 1 d r ©