Title of dissertation: LEAD ZIRCONATE TITANATE THIN FILMS FOR PIEZOELECTRIC ACTUATION AND SENSING OF MEMS RESONATORS Brett Harold Piekarski, Doctor of Philosophy, 2005 Dissertation directed by: Professor Donald DeVoe Department of Mechanical Engineering and Bioengineering Graduate Program This research is focused on examining the potential benefits and limitations of applying sol-gel lead zirco...

Microaccelerometers using piezoelectric lead zirconate titanate (PZT) thin films have attracted much interest due to their simple structure and potentially high sensitivity. In this paper, we present a theoretical model for a microaccelerometer with four suspended flexural PZT-on-silicon beams and a central proof mass configuration. The model takes into account the effect of device geometry and...

The majority of photonic crystals developed till-date are not dynamically tunable, especially in silicon-based structures. Dynamic tunability is required not only for reconfiguration of the optical characteristics based on user-demand, but also for compensation against external disturbances and relaxation of tight device fabrication tolerances. Recent developments in photonic crystals have sugg...

We report results on the direct observation of the microscopic origins of backswitching in ferroelectric thin films. The piezoelectric response generated in the film by a biased atomic force microscope tip was used to obtain static and dynamic piezoelectric images of individual grains in a polycrystalline material. We demonstrate that polarization reversal occurs under no external field ~i.e., ...

Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nitride (AlN) by scandium doped aluminium nitride (ScAlN) thin films as the piezoelectric layer. The...

Theoretical and experimental aspects of an extrinsic optical-fiber ultrasound sensor are described. The sensor is based on a thin transparent polymer film acting as a low-finesse Fabry-Perot cavity that is mounted at the end of a multimode optical fiber. Performance was found to be comparable with that of a piezoelectric polyvinylidene dinuoride-membrane (PVDP) hydrophone with a sensitivity of ...

Recently, a cellulose-based composite material with a thin ZnO nanolayer-namely, ZnO nanocoated cellulose film (ZONCE)-was fabricated to increase its piezoelectric charge constant. However, the fabrication method has limitations to its application in mass production. In this paper, a hydrothermal synthesis method suitable for the mass production of ZONCE (HZONCE) is proposed. A simple hydrother...

When an electric field is applied to a ferroelectric the crystal lattice spacing changes as a result of the converse piezoelectric effect. Although the piezoelectric effect and polarization switching have been investigated for decades there has been no direct nanosecond-scale visualization of these phenomena in solid crystalline ferroelectrics. Synchrotron x-rays allow the polarization switchin...

Biomaterials are used as model systems for the deposition of functional inorganic materials under mild reaction conditions where organic templates direct the deposition process. In this study, this principle was adapted for the formation of piezoelectric ZnO thin films. The influence of two different organic templates (namely, a carboxylate-terminated self-assembled monolayer and a sulfonate-te...

We have imaged optically the spatial distributions of ferroelectricity and piezoelectricity at the diffraction limit. Contributions to the birefringence from electro-optics--linked to ferroelectricity--as well as strain--arising from converse piezoelectric effects--have been recorded simultaneously in a BaTiO3 thin film. The concurrent recording of electro-optic and piezo-optic mappings reveale...