The dissipation of mechanical energy in 250-nm-thick, MHz-range silicon resonators is found to be strongly dependent on the chemical nature of the surface. As a result, sub-monolayer changes in the termination of 250-nm-thick resonators lead to significant changes in quality (Q) factor. The chemical origins of this effect are under investigation. Strategies for the formation of arbitrarily func...

A propulsion system based on acoustic streaming generated by Helmholtz resonators is presented. High frequency (>60 kHz) electrostatically driven micromachined Helmholtz resonators constitute the basic unit of the system. Microjets produced at the exit of these resonators can be combined to form a distributed propulsion system. A high yield (>85%) fabrication process is introduced for fabricati...

Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic carbon resonators (strings and cantilevers) obtained through pyrolysis of photoresist precursors....

We report a method for filtering white light into individual colors using metal-insulator-metal resonators. The resonators are designed to support photonic modes at visible frequencies, and dispersion relations are developed for realistic experimental configurations. Experimental results indicate that passive Ag/Si(3)N(4)/Au resonators exhibit color filtering across the entire visible spectrum....

Backscattering can dramatically modify the response of ring resonators and be the limiting parameter of the Q-factor. We present evidence of backscattering, a model, and a fitting procedure that provides a complete characterization of the resonance. Keywords—resonators; backscattering;

Lower dielectric constant material loaded Combline resonators achieve high-Q and excellent spurious free performance is presented. A design and characteristics are discussed. Simulated responses are presented in this paper. Index Terms combline resonators, permittivity. dielectric constant,

We study ions in a nanotrap, where the electrodes are nanomechanical resonators. The ions play the role of a quantum optical system that acts as a probe and control, and allows entanglement with or between nanomechanical resonators.

High Q traveling-wave resonators (TWR)s are one of the key building block components for VLSI Photonics and photonic integrated circuits (PIC). However, dense VLSI integration requires small footprint resonators. While photonic crystal resonators have shown the record in simultaneous high Q (~10(5)-10(6)) and very small mode volumes; the structural simplicity of TWRs has motivated many ongoing ...

Fluidic resonators with integrated microchannels (hollow resonators) are attractive for mass, density, and volume measurements of single micro/nanoparticles and cells, yet their widespread use is limited by the complexity of their fabrication. Here we report a simple and cost-effective approach for fabricating hollow microtube resonators. A prestructured silicon wafer is annealed at high temper...

One of the aims of the EU project FACE (Friendly Aircraft Cabin Environment) is to reduce aircraft interior noise. For modern aircraft flying at cruise conditions, the turbulent boundary layer is the main source for cabin noise. Normally, the turbulent boundary layer causes the trim panels to vibrate, and hence to radiate sound into the aircraft cabin. The purpose of the present work is to redu...