نتایج جستجو برای: rf sputtering

تعداد نتایج: 40854  

2017
Volodymyr Bobkov Roberto Bilato Laurent Colas Ralph Dux Eric Faudot Helmut Faugel Helmut Fünfgelder Albrecht Herrmann Jonathan Jacquot Arne Kallenbach Daniele Milanesio Riccardo Maggiora Rudolf Neu Jean-Marie Noterdaeme Roman Ochoukov Thomas Pütterich Wouter Tierens Wei Zhang

The response of the local RF current measured at limiters of 3-strap ICRF antenna to variations of power balance and phasing at fICRF=30MHz agrees qualitatively well with EM calculations by TOPICA and RAPLICASOL codes. Measurements of tungsten sputtering yield and DC current at the limiters correlate strongly with the local RF current. In contrast to findings for the 2-strap antennas, values of...

2017
Kai-Huang Chen Tsung-Ming Tsai Chien-Min Cheng Shou-Jen Huang Kuan-Chang Chang Shu-Ping Liang Tai-Fa Young

In this study, the hopping conduction distance and bipolar switching properties of the Gd:SiOx thin film by (radio frequency, rf) rf sputtering technology for applications in RRAM devices were calculated and investigated. To discuss and verify the electrical switching mechanism in various different constant compliance currents, the typical current versus applied voltage (I-V) characteristics of...

Journal: :Journal of the Ceramic Association, Japan 1986

Journal: :Transactions of the Japan Institute of Metals 1982

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