An easy method for fabricating microand nanofluidic channels, entirely made of a thermally grown silicon dioxide is presented. The nanochannels are up to 1-mm long and have widths and heights down to 200 nm, whereas the microfluidic channels are 20-lm wide and 4.8-lm high. The nanochannels are created at the interface of two silicon wafers. Their fabrication is based on the expansion of growing...

Formation mechanisms of spatially-directed zincblende gallium nitride nanocrystals Role of oxygen on microstructure and thermoelectric properties of silicon nanocomposites Spectrally and temporarily resolved luminescence study of short-range order in nanostructured amorphous ZrO2 Characterization of luminescent silicon carbide nanocrystals prepared by reactive bonding and subsequent wet chemica...

The biocompatibility and biofouling of the microfabrication materials for a MEMS drug delivery device have been evaluated. The in vivo inflammatory and wound healing response of MEMS drug delivery component materials, metallic gold, silicon nitride, silicon dioxide, silicon, and SU-8(TM) photoresist, were evaluated using the cage implant system. Materials, placed into stainless-steel cages, wer...

rapid thermal processing (rtp) has become a key technology for semiconductor device manufacturing in a variety of applications, such as thermal oxidation, annealing, and thin-film growth. hence, understanding the radiative properties of silicon and other relevant materials is essential for the analysis of the thermal transport processes. we have analyzed and calculated the spectral, directional...

abstract: in this study, al 2 o 3 –sic nanocomposites have been fabricated by mixing of alumina powder containing 0.05% weight magnesium oxide and silicon carbide nano powders, followed by hot pressing at 1650 0 c. the mechanical properties of al 2 o 3 -sic nanocomposites containing different volume fraction (2.5, 5, 7.5, 10 and 15%) of nano scale sic particles were investigated and compared wi...

Nanocomposites formed by porous silicon (PS) and zinc oxide (ZnO) have potential for applications in optoelectronic devices. However, understanding the distribution of both materials in the nanocomposite, and especially the fine structure of the synthesized ZnO crystals, is key for future device fabrication. This study focuses on the advanced characterization of a range of PS-ZnO nanocomposites...

SUPERCRITICAL CARBON DIOXIDE PROCESSING OF NANO CLAYS ANDPOLYMER/CLAY NANOCOMPOSITESbyMIHAI MANITIUAugust 2010Advisor: Rangaramanujam KannanCo-Advisor: Esin GulariMajor: Chemical EngineeringDegree: Doctor of Philosophy Effective dispersion of the fillers in a polymer matrix and improvement of polymer clayinteractions are two key challenges in the field of...

Recent evidence suggests silicon dioxide micro- and nanoparticles induce cytotoxic effects on lung cells. Thus, there is an increasing concern regarding their potential health hazard. Nevertheless, the putative toxicity of nanoparticles in mammalian cells has not yet been systematically investigated. We previously noted that several metallic oxide nanoparticles exert differential cytotoxic effe...

Silicon dioxide (SiO2) thin films are most commonly used insulating films in the fabrication of silicon-based integrated circuits (ICs) and microelectromechanical systems (MEMS). Several techniques with different processing environments have been investigated to deposit silicon dioxide films at temperatures down to room temperature. Anodic oxidation of silicon is one of the low temperature proc...