We review progress toward microcantilever arrays with in-plane photonic readout for biosensing applications. Microcantilever arrays are fabricated on individual silicon-on-insulator (SOI) chips and integrated with two-layer polydimethylsiloxane (PDMS) microfluidics that incorporate fluid channels and valves. Microcantilever functionalization is accomplished by inkjetting appropriate fluids onto...

Optical nano-cavities are ideal platforms for label-free sensing. In this work, we demonstrated sensing of glucose concentrations at 10mg/dL with photonic crystal nanobeam sensor. The sensor exhibits high sensitivity and linearity covering the whole range of clinically relevant levels. Current device was fabricated in silicon-on-insulator platform and operated at telecom wavelength, and thus fu...

In this work we report on microactuators and microgrippers fabricated from SOI (Silicon On Insulator) wafers by a surface and bulk micromachining fabrication technology. The main advantages of this technology are: a) large thickness of the devices (10 μm up to 40 μm) resulting in devices which are stable against disturbing forces perpendicular (z-direction) to the ground plate. b) the small num...

We propose a new analytical approach to the study of all-dielectric metamaterials allowing the prediction of the optical index maps and the required hole drilling distributions making light follow prescribed paths. The method will be applied to proof-of-concept structures based on the silicon-on-insulator technology. Light propagation will be studied using FDTD simulation to verify light trajec...

In this paper, we study the magnitude and the sign of optical refractive index of Si nanostructures (nanoporous silicon and 1D periodic silicon-on-insulator nanostructures) using the reflection intensity scan method, which was developed in our laboratory. Our experimental results were reproducible and in good agreement with theoretical predictions, proving the efficiency of this method in the c...

We present the realization of a new generation of Silicon-On-Insulator fiber-tochip grating couplers which use a silicon overlay to enhance the directionality and thereby the coupling efficiency. Devices fabricated in a CMOS pilot line show a coupling efficiency of -1.6dB and a 3dB bandwidth of 80nm.

A simple methodology for implementation of low-order, current-mode, log-domain filters in CMOS technology is presented. The key transistors in the circuit are operated in weak inversion and in contrast with previous approaches may pass into the triode regime. The concept is particularly suited to implementation in silicon-on-insulator technology, because dielectric isolation of the transistors ...

B. Ashcroft, B. Takulapalli, J. Yang, G. M. Laws , H. Q. Zhang , N. J. Tao , S. Lindsay, D. Gust, and T. J. Thornton 3 1 Department of Physics & Astronomy, P.O. Box 871504, Arizona State University, Tempe, AZ 85287, USA 2 Center for Solid State Electronics Research, P.O. Box 876206, Arizona State University, Tempe, AZ 85287, USA 3 Department of Electrical Engineering, P.O. Box 875706, Arizona S...