Title of dissertation: CHARACTERIZATION OF METAL-OXIDE-SEMICONDUCTOR STRUCTURES AT LOW TEMPERATURES USING SELF-ALIGNED AND VERTICALLY COUPLED ALUMINUM AND SILICON SINGLE-ELECTRON TRANSISTORS Luyan Sun, Doctor of Philosophy, 2008 Dissertation directed by: Dr. Bruce E. Kane Department of Physics I incorporate an Al-AlOx-Al single-electron transistor (SET) as the gate of a narrow (∼ 100 nm) metal-...
