نتایج جستجو برای: tantalum nitride
تعداد نتایج: 16947 فیلتر نتایج به سال:
Journal:
International Journal of Engineering
2017
Crystalline tantalum thin films of about 500nm thickness were deposited on AISI 316L stainless steel substrate using magnetron sputtering. To investigate the nano-mechanical properties of tantalum films, deposition was performed at two temperatures (25°C and 200°C) on TaNx intermediate layer with different N2/Ar flow rate ratio from 0 to 30%. Nano-indentation was performed to obtain the mechani...
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:Journal of the Ceramic Society of Japan
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:Journal of Applied Physics
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:Journal of the Ceramic Society of Japan
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:Surface and Interface Analysis
2008
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:IEEJ Transactions on Sensors and Micromachines
2005
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:Journal of the Ceramic Society of Japan
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:Applied Microscopy
2020
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:Microscopy and Microanalysis
2018
Journal:
:IEEE Transactions on Applied Superconductivity
2013
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