We consider the deposition of a film of viscous liquid on a flat plate being withdrawn from a bath, experimentally and theoretically. For any plate speed U, there is a range of "thick" film solutions whose thickness scales like U{1/2} for small U. These solutions are realized for a partially wetting liquid, while for a perfectly wetting liquid the classical Landau-Levich-Derjaguin film is obser...

⎯ This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices ...

Major part of this work was carried out in Hsinchu. ABSTRACT Mask-making process using laser direct-write has been broadly applied in the microelectronics and the PC board industries. In this paper, we report the thick-film lithography of laser write mainly for the x-ray mask in the LIGA application. Several schemes of multiple writing are successfully demonstrated in terms of the sidewall stra...

The spin coating of thin (> 200 nm thick) and ultrathin (< 200 nm thick) polymer films is examined in several solvents of varying volatility over a broad range of polymer solution concentrations and spin speeds. Experimentally measured film thicknesses are compared with a simple model proposed by Bornside, Macosko, and Scriven, which predicts film thickness based on the initial properties of th...

Titanium oxide (TiO2) films and TiO2/SiNx stacks have potential in surface passivation, anti-reflection coatings and carrier-selective contact layers for crystalline Si solar cells. A Si wafer, deposited with 8-nm-thick TiO2 film by atomic layer deposition, has a surface recombination velocity as low as 14.93 cm/s at the injection level of 1.0 × 1015 cm−3. However, the performance of silicon su...

Most of those techniques used for the measurement of elastic coefficients for bulk piezoelectric ceramics are not applicable to films deposited on thick substrates because the measured properties, such as the resonant frequency, are usually dominated by the presence of the thick substrate. This work presents a preliminary study for the application of Alemany et al. automatic iterative method fo...

A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Registration accuracy comparable wit...

We discuss a custom built hybrid physical chemical vapour deposition (HPCVD) system for MgB2 ultra-thin film deposition: construction, deposition process development, and optimization. Achieved films on SiC substrates have a critical temperature (Tc) ranging from 35K (10nm thick films) to 41K (40nm thick films). The 20nm thick unpatterned film had a room temperature resistivity of 13μΩ·cm, wher...

The buckybowl corannulene is known to be an excellent electron acceptor. UV photoelectron spectroscopy studies were performed with thin-film systems containing corannulene and cesium. Adsorption of submonolayer quantities of corannulene in ultrahigh vacuum onto thick Cs films, deposited at 100 K on a copper(111) substrate, induces a transfer of four electrons per molecule into the two lowest un...

A thin film Co nanomagnet in the shape of an elongated hexagon has been incorporated in a vertical device structure consisting of the nanomagnet and a thin Cu spacer layer formed on top of a thick Co film. The spin-polarized current flowing between the nanomagnet and the Co film is used to abruptly switch the magnetic alignment of the nanomagnet relative to that of the thick Co layer by the tra...