The nature of solvent-biomolecule interactions is generally weak and non-specific. The addition of ionic liquids (ILs), which have emerged as a new class of solvents, strengthen the stability of some proteins whereas the same ILs weaken the stability of some other proteins. Although ILs are commonly used for the stabilization of biomolecules, the bimolecular interactions of their stabilization-...

This paper proposes a new technique to engineer the Fin channel in vertical GaN FinFET toward straight and smooth sidewall. Consequently, wet etching TMAH solution is detailed; we found that m-GaN plane has lower surface roughness than crystallographic planes with other orientations, including a-GaN plane. The grooves slope (Cuboids) at base are also investigated. agitation does not assist Cubo...

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode ...

We have developed and demonstrated a new methodology for in situ monitoring and characterization of CMOS post-process micromachining utilizing integrated circuits and micromachine test-structures. In our demonstration, the circuits provide automated readout of N-well resistors surrounding each of the 140 test pit structures at up to 14,000 samples per second per device during the post-process s...