In this study, we fabricated piezoelectric energy harvesters composed of lead-free (K,Na)NbO3 (KNN) thin films and compared the power generation performance with PZT-thin film energy harvesters. Both of the piezoelectric thin films were deposited on Pt/Ti/Si cantilevers by rf-sputtering. The KNN and PZT thin films had perovskite structure, and showed the relative dielectric constants of 744 and...

This paper introduces the design, manufacture, dynamic analysis, and experimental results of a piezoelectric pump driven by inertial force vibrator supported slotted beam. The is composed mass block, displacement amplifier, beam fixed with both ends. In resonant mode, amplifier drives to work, produces amplitude force. this paper, design optimizes output amplifier. addition, supports increases ...

A shear piezoelectric vibrator has been analyzed in detail. There are two types of shear motion associated with the same shear stain deformation. It is found experimentally that the lower frequency mode among the two has lower strength and its vibration amplitude continuously decreases as the long dimension of the vibrator increases. A nearly pure shear mode may be obtained with the aspect rati...

In order to study the variation of vortices and heat transfer enhancement characteristics piezoelectric vibrating cantilever in liquid-cooled channels, effects fluid density viscosity, mainstream velocity, excitation voltage on were analyzed. The theoretical numerical simulation was carried out by using fluid-solid coupling method. On basis hydrodynamic function considering additional effect li...

Title of dissertation: PIEZOELECTRIC MICROBEAM RESONATORS BASED ON EPITAXIAL Al0.3Ga0.7As FILMS Lihua Li, Doctor of Philosophy, 2005 Dissertation directed by: Professor Don DeVoe Department of Mechanical Engineering In this work, piezoelectric resonators based on single crystal Al0.3Ga0.7As films are implemented. The combination of Si doped Al0.3Ga0.7As as electrode layers and moderate piezoele...

A vacuum environment is indispensable for various measurement devices. To make the use of these devices easy, the mechatronics systems for vacuum conditions, for example, a sample stage, should be advanced. In this paper, we propose a rotational feedthrough using an ultrasonic motor. An ultrasonic motor has many advantages, and is suitable for achieving vacuum conditions. However, the piezoelec...

The process of capturing the energy from a system’s environment or surrounding and converting it into usable electrical energy is termed as energy harvesting. One form of energy harvesting is to employ piezoelectric materials to harvest energy from vibrating structures. These materials have the ability to absorb the mechanical energy and transform it into electrical energy that can be used to p...